초록

Two FOUPs are stacked and moved together towards an equipment wall by a horizontal actuator. FOUP doors are withdrawn as a unit by a horizontal actuator, and lowered as a unit by a vertical actuator to provide access to the interior of the FOUPs.

대표청구항 ▼

[ What is claimed is:] [1.] Apparatus for connecting front opening unified pods to substrate handling equipment, said apparatus comprising:a lower pod support platform;an upper pod support platform spaced above the lower platform a distance to permit the placement of a pod on the lower platform;a lo

[ What is claimed is:] [1.] Apparatus for connecting front opening unified pods to substrate handling equipment, said apparatus comprising:a lower pod support platform;an upper pod support platform spaced above the lower platform a distance to permit the placement of a pod on the lower platform;a lower pod door opener interface configured to interface with a front door of said the pod in the lower platform;an upper door opener interface configured to interface with a front door of a pod on the upper platform, said upper and lower interfaces being interconnected so that movement of the lower interface will move the upper interface;a horizontal actuator located below said lower platform for moving said pods and said door opening interfaces horizontally to remove front doors from said pods; anda vertical actuator located below said lower platform for lowering both of said door opening interfaces at the same time together with said pod doors carried by said interfaces to permit access to substrates within the interior of said pods.