초록 ▼

A bubbler ampoule and bubbler assembly for containing highly corrosive chemicals is configured so as to provide enhanced strength which allows safe transport and usage of high vapor pressure chemicals. The enhanced assembly strength is provided by controlling the ratio of the bottom wall thickness t

A bubbler ampoule and bubbler assembly for containing highly corrosive chemicals is configured so as to provide enhanced strength which allows safe transport and usage of high vapor pressure chemicals. The enhanced assembly strength is provided by controlling the ratio of the bottom wall thickness to the side wall thickness of the ampoule; and by providing properly radiused corners on the ampoule.

대표청구항 ▼

[ What is claimed:] [1.] A glass bubbler ampoule for containing a high purity high vapor pressure liquid chemical, said ampoule having a side wall, a top wall and a bottom wall, said top wall and said bottom wall being connected to said side wall by radiused upper and lower corners respectively, sai

[ What is claimed:] [1.] A glass bubbler ampoule for containing a high purity high vapor pressure liquid chemical, said ampoule having a side wall, a top wall and a bottom wall, said top wall and said bottom wall being connected to said side wall by radiused upper and lower corners respectively, said ampoule having a carrier gas inlet neck integral and in one piece with said top wall and a carrier gas inlet tube which is integral and in one piece with said inlet neck, said inlet tube extending downwardly into said ampoule, and said inlet tube having an outer frustoconical surface which terminates at a lower end of said inlet tube, said lower end of said inlet tube being formed with a single carrier gas emission opening.