초록 ▼

A robotic wafer handler is mounted on a central platform of a cluster tool for transporting wafers between loading and processing stations. The wafer handler includes a main arm that is rotatable around a vertical axis, translatable along the vertical axis, and translatable along a horizontal axis t

A robotic wafer handler is mounted on a central platform of a cluster tool for transporting wafers between loading and processing stations. The wafer handler includes a main arm that is rotatable around a vertical axis, translatable along the vertical axis, and translatable along a horizontal axis that rotates with the main arm around the vertical axis. An auxiliary arm is translatable along the horizontal axis relative to the main arm between extended and retracted positions. In the extended position, an end effector of the auxiliary arm is aligned with an end effector of the main arm for retrieving or replacing wafers with the auxiliary arm. In the retracted position, the end effector of the auxiliary arm is withdrawn for retrieving or replacing wafers with the main arm.

대표청구항 ▼

[ I claim:] [1.] A robotic handler mountable on a platform that interconnects loading and processing stations of a tool for processing wafers comprising:a main arm mountable on the platform and having a first end effector for supporting a first wafer;a first drive for rotating said main arm with res

[ I claim:] [1.] A robotic handler mountable on a platform that interconnects loading and processing stations of a tool for processing wafers comprising:a main arm mountable on the platform and having a first end effector for supporting a first wafer;a first drive for rotating said main arm with respect to the platform around a first axis;a second drive for translating said main arm with respect to the platform along said first axis;a third drive for translating said main arm with respect to the platform along a second axis that rotates with said main arm around said first axis;an auxiliary arm supported and guided by a linear bearing of said main arm and having a second end effector for supporting a second wafer;a fourth drive for translating said auxiliary arm along said linear bearing of said main arm along said second axis; anda controller that operates said drives for retrieving the second wafer from one of the stations and depositing the first wafer in the same station at a given angular position of said main arm.