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Method for producing thin-film solar cell and equipment for producing the same 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-014/34
출원번호 US-0841688 (1997-04-30)
우선권정보 JP-0299797 (1996-10-25)
발명자 / 주소
  • Kushiya Katsumi,JPX
  • Tachiyuki Muneyori,JPX
  • Kase Takahisa,JPX
출원인 / 주소
  • Showa Shell Sekiyu K.K., JPX
대리인 / 주소
    Sughrue, Mion, Zinn, Macpeak & Seas, PLLC
인용정보 피인용 횟수 : 110  인용 특허 : 7

초록 ▼

A thin-film light absorbing layer which is regulated so as to have any desired gallium concentration and which is capable of attaining a high open-circuit voltage is formed by a simple method at a temperature lower than the softening point of the soda-lime float glass. A light absorbing layer is for

대표청구항 ▼

[ What is claimed is:] [1.] A method for producing a thin-film light absorbing layer for a thin-film solar cell which comprisesforming a stacked precursor film comprising a copper-gallium alloy layer and an indium layer on a metallic back electrode layer by sputtering, andthen heating the precursor

이 특허에 인용된 특허 (7)

  1. Adam Helmut (Stuttgart DT) Lutz Hans (Stuttgart DT) Siegle Gert (Hildesheim DT), Apparatus for concurrently sputtering different materials.
    상세보기
  2. Thornton ; deceased John A. (late of Champaign IL by Joy Crane Thornton ; legal representative) Lommasson Timothy (Champaign IL) Rockett Angus (Champaign IL), Hybrid method for depositing semi-conductive materials.
    상세보기
  3. Ermer James H. (Los Angeles CA) Love Robert B. (Chatsworth CA), Method for forming Cu In Se2 films.
    상세보기
  4. Love Robert B. (Chatsworth CA) Choudary Uppala V. (Chatsworth CA), Method for forming photovoltaic cells employing multinary semiconductor films.
    상세보기
  5. Hedstrm Jonas (Stockholm SEX), Method for manufacturing solar cells.
    상세보기
  6. Mickelsen Reid A. (Bellevue WA) Chen Wen S. (Seattle WA), Methods for forming thin-film heterojunction solar cells from I-III-VI2 chalcopyrite compounds, and solar.
    상세보기
  7. Pollock Gary A. (Canoga Park CA) Mitchell Kim W. (Granada Hills CA) Ermer James H. (Burbank CA), Thin film solar cell and method of making.
    상세보기

이 특허를 인용한 특허 (110)

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  2. Morel, Don, Advanced 2-step, solid source deposition approach to the manufacture of CIGS solar modules.
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  3. Woods, Lawrence M.; Armstrong, Joseph H., Apparatus and method for hybrid photovoltaic device having multiple, stacked, heterogeneous, semiconductor junctions.
    상세보기
  4. Woods, Lawrence M.; Armstrong, Joseph H., Apparatus and method for hybrid photovoltaic device having multiple, stacked, heterogeneous, semiconductor junctions.
    상세보기
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    상세보기
  6. Basol, Bulent M., Apparatus for continuous processing of buffer layers for group IBIIIAVIA solar cells.
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  7. Doering, Kenneth B.; Wieting, Robert D., Apparatus for manufacturing thin film photovoltaic devices.
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  8. Basol, Bulent M., Apparatus for simultaneous roll-to-roll wet processing of two workpieces disposed within a single chamber.
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  9. Farris, III, Chester A.; Brown, Albert S., Application specific solar cell and method for manufacture using thin film photovoltaic materials.
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  13. Lee, Howard W. H., Bulk metal species treatment of thin film photovoltaic cell and manufacturing method.
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  14. Lee, Howard W. H., Bulk sodium species treatment of thin film photovoltaic cell and manufacturing method.
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  33. Wieting, Robert D., In chamber sodium doping process and system for large scale cigs based thin film photovoltaic materials.
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  42. Wieting, Robert D., Manufacturing method for patterning CIGS/CIS solar cells.
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  53. Mikulec, Frederic Victor; Gao, Bing Shen; Lee, Howard W. H., Method and material for purifying iron disilicide for photovoltaic application.
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  56. Lee, Howard W. H., Method and structure for thin film photovoltaic materials using bulk semiconductor materials.
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  57. Lee, Howard W. H., Method and structure for thin film photovoltaic materials using bulk semiconductor materials.
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  58. Lee, Howard W. H., Method and structure for thin film photovoltaic materials using semiconductor materials.
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  59. Wieting, Robert D., Method and structure for tiling industrial thin-film solar devices.
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  60. Lee, Howard W. H.; Farris, III, Chester A., Method and system for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration.
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  61. Lee, Howard W. H.; Farris, III, Chester A., Method and system for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration.
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  62. Lee, Howard W. H.; Farris, III, Chester A., Method and system for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration.
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  63. Lee, Howard W. H.; Farris, III, Chester A., Method and system for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration.
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  64. Lee, Howard W. H.; Farris, III, Chester A., Method and system for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration.
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  65. Lee, Howard W. H.; Farris, III, Chester A., Method and system for large scale manufacture of thin film photovoltaic devices using single-chamber configuration.
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