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Piezoelectric/electrostrictive film element having convex diaphragm portions and method of producing the same 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-041/08
출원번호 US-0385926 (1995-02-09)
우선권정보 JP-0241172 (1994-10-05)
발명자 / 주소
  • Takeuchi Yukihisa,JPX
  • Nanataki Tsutomu,JPX
출원인 / 주소
  • NGK Insulators, Ltd., JPX
대리인 / 주소
    Parkhurst & Wendel, L.L.P
인용정보 피인용 횟수 : 42  인용 특허 : 20

초록 ▼

A piezoelectric/electrostrictive film element which includes a ceramic substrate having at least one window and a diaphragm portion for closing each window, and a film-like piezoelectric/electrostrictive unit formed on the diaphragm portion. The diaphragm portion has a convex shape and protrudes out

대표청구항 ▼

[ What is claimed is:] [1.] A piezoelectric/electrostrictive film element comprising:a ceramic substrate having at least one window, and a diaphragm portion formed as an integral part thereof, for closing each of said at least one window, said diaphragm portion having a convex shape and protruding o

이 특허에 인용된 특허 (20)

  1. Carter Robert E. (Auburndale MA) Murphy Donald R. (Wellesley MA), Aerosol dispenser.
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  2. Claussen Nils (Leonberg DEX) Rhle Manfred (Ditzingen DEX) Petzow Gnter (Leinfelden-Echterdingen DEX), Ceramic body of zirconium dioxide (ZrO2) and method for its preparation.
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  3. Ando Otaro (Hino JPX), Composite type acoustic transducer.
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  4. Sullivan Steven L. (P.O. Box 705 Harpers Ferry WV 26425), Dipole horn piezoelectric electro-acoustic transducer design.
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  5. Ravinet Pierre (Paris FRX) Claudepierre Christian (Paris FRX) Guillou Denis (Paris FRX) Micheron Francois (Paris FRX), Electroacoustic transducer of the piezoelectric polymer type.
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  6. Ravinet Pierre (Bourg La Reine FRX) Claudepierre Christian (Athis-Mons FRX) Guillou Denis (Colombes FRX) Micheron Francois (Gif Sur Yvette FRX), Electroacoustic transducer with a piezoelectric diaphragm.
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  7. Hubbard David W. (Stamford CT) Seestrom Frank E. (Weston CT), Ink jet array.
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  8. Tamura Masahiko (Tokorozawa JA) Oyaba Takashi (Tokorozawa JA), Piezoelectric diaphragm electro-acoustic transducer.
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  9. Smits Johannes G. (22 Farrell St. Quincy MA 02169), Piezoelectric micropump with microvalves.
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  10. Park Kyung T. (Berwyn PA), Piezoelectric snap action switch.
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  11. Takeuchi Yukihisa (Aichi JPX) Kimura Koji (Nagoya JPX), Piezoelectric/electrostrictive actuator having at least one piezoelectric/electrostrictive film.
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  12. Takeuchi Yukihisa (Nishikamo JPX) Kimura Koji (Nagoya JPX), Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion.
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  13. Sonuparlak Birol (Seattle WA) Aksay Ilhan A. (Seattle WA), Process for the production of porous ceramics using decomposable polymeric microspheres and the resultant product.
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  14. Frische Richard H. (Phoenix AZ) Sherrer Tony L. (Colorado Springs CO), Process of bonding plates.
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  15. Hubbard David W. (Stamford CT), Single element transducer for an ink jet device.
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  16. Ketcham Thomas D. (Big Flats NY) Sanderson ; deceased Wayne B. (Corning NY by Stuart R. Sanderson ; administrator) St. Julien Dell J. (Watkins Glen NY) Wexell Kathleen A. (Corning NY), Thin flexible sintered structures.
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  17. Miyazaki Hajime (Suwa JPX) Handa Masaaki (Suwa JPX) Uehara Taisuke (Suwa JPX) Muranaka Tsukasa (Suwa JPX) Kamisuki Shinichi (Suwa JPX) Nose Yasuto (Suwa JPX), Two-valve thin plate micropump.
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  18. Quedens Phillipp J. (Berlin CT) Haverl Ronald A. (Andover CT) Stoller Milton (West Hartford CT), Ultrasonic beam scanning technique and apparatus.
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  19. van Lintel Harald T. G. (Enschede NLX), Valve and micropump incorporating said valve.
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  20. Frische Richard H. (Phoenix AZ) Dankwort Rudolf C. (Phoenix AZ) Klem Charles D. (Phoenix AZ), Vibrating quartz diaphragm pressure sensor.
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  2. Nanataki,Tsutomu; Yoshioka,Kunihiko, Diaphragm structure.
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  3. Fraser, John Douglas, Fabrication of capacitive micromachined ultrasonic transducers by micro-stereolithography.
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  4. Inokawa, Hiroyuki; Satoh, Kimiyasu, Input device and process for manufacturing the same, portable electronic apparatus comprising input device.
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  5. Hirai, Eiju, Liquid ejecting head and liquid ejecting apparatus.
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  6. Takeuchi, Yukihisa; Nanataki, Tsutomu; Kimura, Koji, Method for producing a piezoelectric/electrostrictive device.
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  7. Takeuchi, Yukihisa; Shibata, Kazuyoshi; Namerikawa, Masahiko, Method of manufacturing a piezoelectric/electrostrictive device.
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  8. Takeuchi, Yukihisa; Shibata, Kazuyoshi; Namerikawa, Masahiko, Method of manufacturing a piezoelectric/electrostrictive device.
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  9. Takeuchi, Yukihisa; Nanataki, Tsutomu; Kimura, Koji, Method of producing a piezoelectric/electrostrictive device.
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  10. Callahan, Karla M.; Kahraman, Firat, Methods and apparatus for conformable medical data acquisition pad and configurable imaging system.
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  11. Robinson, Andrew L., Micromachined ultrasound transducer and method for fabricating same.
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  12. Fleischman, Aaron J.; Roy, Shuvo; Lockwood, Geoffrey R., Miniature ultrasound transducer.
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  13. Kashiwaya, Toshikatsu; Yamamoto, Kazuhiro; Takahashi, Masao, Piezoelectric/electrostrictive device.
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  14. Takeuchi, Yukihisa; Shibata, Kazuyoshi, Piezoelectric/electrostrictive device.
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  15. Takeuchi, Yukihisa; Shibata, Kazuyoshi, Piezoelectric/electrostrictive device.
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  16. Takeuchi,Yukihisa; Nanataki,Tsutomu; Ikeda,Koji; Kimura,Koji; Shibata,Kazuyoshi, Piezoelectric/electrostrictive device.
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  17. Takeuchi,Yukihisa; Shibata,Kazuyoshi; Namerikawa,Masahiko, Piezoelectric/electrostrictive device.
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  18. Takeuchi,Yukihisa; Shibata,Kazuyoshi; Namerikawa,Masahiko, Piezoelectric/electrostrictive device.
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  19. Takeuchi, Yukihisa; Nanataki, Tsutomu; Ikeda, Koji; Kimura, Koji; Shibata, Kazuyoshi, Piezoelectric/electrostrictive device and method of manufacturing same.
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  20. Takeuchi, Yukihisa; Nanataki, Tsutomu; Ikeda, Koji; Kumura, Koji; Shibata, Kazuyoshi, Piezoelectric/electrostrictive device and method of manufacturing same.
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  21. Takeuchi, Yukihisa; Nanataki, Tsutomu; Kimura, Koji, Piezoelectric/electrostrictive device and method of manufacturing same.
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  24. Takeuchi, Yukihisa; Nanataki, Tsutomu; Namerikawa, Masahiko; Kimura, Koji; Shibata, Kazuyoshi, Piezoelectric/electrostrictive device and method of manufacturing same.
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  25. Takeuchi, Yukihisa; Shibata, Kazuyoshi; Namerikawa, Masahiko, Piezoelectric/electrostrictive device and method of manufacturing same.
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  26. Takeuchi, Yukihisa; Shibata, Kazuyoshi; Namerikawa, Masahiko, Piezoelectric/electrostrictive device and method of manufacturing same.
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  27. Takeuchi,Yukihisa; Shibata,Kazuyoshi; Namerikawa,Masahiko, Piezoelectric/electrostrictive device and method of manufacturing same.
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  28. Takeuchi,Yukihisa; Shibata,Kazuyoshi; Namerikawa,Masahiko, Piezoelectric/electrostrictive device and method of manufacturing same.
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  29. Yukihisa Takeuchi JP; Tsutomu Nanataki JP; Koji Ikeda JP; Koji Kimura JP; Kazuyoshi Shibata JP, Piezoelectric/electrostrictive device and method of manufacturing same.
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  30. Yukihisa Takeuchi JP; Tsutomu Nanataki JP; Koji Kimura JP, Piezoelectric/electrostrictive device and method of manufacturing same.
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  33. Yukihisa Takeuchi JP; Tsutomu Nanataki JP; Masahiko Namerikawa JP; Koji Kimura JP; Kazuyoshi Shibata JP, Piezoelectric/electrostrictive device and method of manufacturing same.
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  34. Yukihisa Takeuchi JP; Tsutomu Nanataki JP; Koji Kimura JP, Piezoelectric/electrostrictive device having increased strength.
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  35. Yukihisa Takeuchi JP; Tsutomu Nanataki JP; Koji Ikeda JP; Koji Kimura JP; Kazuyoshi Shibata JP, Piezoelectric/electrostrictive device having mutually opposing end surfaces and method of manufacturing the same.
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  36. Takeuchi, Yukihisa; Nanataki, Tsutomu; Ikeda, Koji; Kimura, Koji; Shibata, Kazuyoshi, Piezoelectric/electrostrictive device having mutually opposing thin plate section.
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  37. Koizumi, Takaaki; Yamaguchi, Hirofumi; Tanaka, Ritsu, Piezoelectric/electrostrictive porcelain composition and method of manufacturing the same.
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  38. Bjoerkman,Per; Olsson,Ray, Process for manufacturing a capacitive vacuum measuring cell.
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  39. Buccafusca, Osvaldo; Martin, Steven, Transducer device having coupled resonant elements.
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  40. Buccafusca, Osvaldo; Martin, Steven, Transducer device having coupled resonant elements.
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