초록 ▼

According to an automatic carrier control method of a semiconductor wafer cassette transportation apparatus having high semiconductor wafer cassette transportation ability, an automatic carrier carries a semiconductor wafer cassette to an automatic carrier related inlet port of a stocker under contr

According to an automatic carrier control method of a semiconductor wafer cassette transportation apparatus having high semiconductor wafer cassette transportation ability, an automatic carrier carries a semiconductor wafer cassette to an automatic carrier related inlet port of a stocker under control of a host computer. The automatic carrier confirms whether a semiconductor wafer cassette is left on the inlet port. If there is no preceding semiconductor wafer cassette, a semiconductor wafer cassette is placed on the inlet port. If there is a preceding semiconductor wafer cassette, the automatic carrier waits for a predetermined time at inlet port for the preceding semiconductor wafer cassette to be removed. When the preceding semiconductor wafer cassette is not removed at an elapse of a predetermined time, an error is issued to the automatic carrier.

대표청구항 ▼

[ What is claimed is:] [1.] An automatic carrier control method employed in a semiconductor wafer cassette transportation apparatus includinga stocker system for storing a plurality of semiconductor wafer cassettes,a processing apparatus for applying a process on said semiconductor wafer cassette,an

[ What is claimed is:] [1.] An automatic carrier control method employed in a semiconductor wafer cassette transportation apparatus includinga stocker system for storing a plurality of semiconductor wafer cassettes,a processing apparatus for applying a process on said semiconductor wafer cassette,an automatic carrier for carrying out a transportation task of said semiconductor wafer cassette between said stocker and said processing apparatus,an inter-stocker transport device for carrying out a transportation task of said semiconductor wafer cassette between a source stocker and a destination stocker, anda host computer for providing control of said stocker, said inter-stocker transport device, said automatic carrier and said processing apparatus,wherein said stocker includes an automatic carrier related inlet port for entry of said semiconductor wafer cassette by said automatic carrier,said automatic carrier control method comprising the steps of:transporting said semiconductor wafer cassette from said processing apparatus to said automatic carrier related inlet port using said automatic carrier under control of said host computer,determining whether there is a preceding semiconductor wafer cassette at said automatic carrier inlet port, andwhen there is a preceding semiconductor wafer cassette at said automatic carrier related inlet port, waiting for a predetermined time for said preceding semiconductor wafer cassette to be entered.