$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Substrate processing apparatus, substrate transport apparatus and substrate transfer apparatus

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B65H-001/00
출원번호 US-0039824 (1998-03-16)
우선권정보 JP-0068201 (1997-03-21)
발명자 / 주소
  • Ohtani Masami,JPX
  • Imanishi Yasuo,JPX
  • Tsuji Masao,JPX
  • Kawamoto Takanori,JPX
  • Iwami Masaki,JPX
  • Nishimura Joichi,JPX
  • Morita Akihiko,JPX
출원인 / 주소
  • Dainippon Screen Mfg. Co., Ltd., JPX
대리인 / 주소
    Ostrolenk, Faber, Gerb & Soffen, LLP
인용정보 피인용 횟수 : 79  인용 특허 : 2

초록

A unit arrangement part comprises a chemical cabinet on its lowermost part, while coating units for forming a resist film on a substrate and developing units for developing the substrate after exposure are arranged on four corners of an apparatus above the chemical cabinet. Further, multistage therm

대표청구항

[ We claim:] [1.] An apparatus for processing a substrate, comprising:a) substrate transport means being vertically movable and rotatable about a vertical axis;b) a plurality of wet processing units being arranged around said substrate transport means for processing said substrate with prescribed pr

이 특허에 인용된 특허 (2)

  1. Hasebe Keizo,JPX ; Nagashima Shinji,JPX ; Semba Norio,JPX ; Akimoto Masami,JPX ; Kimura Yoshio,JPX ; Iida Naruaki,JPX ; Harada Kouji,JPX ; Ueda Issei,JPX ; Konishi Nobuo,JPX, Substrate processing system.
  2. Ueyama Tsutomu (Kyoto JPX) Adachi Hideki (Kyoto JPX) Matsumura Yoshio (Hikone JPX) Tanaka Yasuhide (Kyoto JPX), Subtrate processing apparatus and device for and method of exchanging substrate in substrate processing apparatus.

이 특허를 인용한 특허 (79)

  1. Kaufman Robert ; Downes Gary C., Apparatus and method for inserting a wafer, substrate or other article into a process module.
  2. Nagashima, Shinji; Miyamoto, Hiroyuki; Ogawa, Shizuo; Koga, Shinji, Apparatus for forming coating film and apparatus for curing the coating film.
  3. Ammann, Kelly G.; Burns, Ralph E.; Hansberry, Ernest V.; Horner, Glenn A.; Jakub, Cheryl A.; Kling, John E.; Nieglos, Donald J.; Schneider, Robert E.; Smith, Robert J., Automated analyzer for performing a nucleic acid-based assay.
  4. Ochranek, Brian L.; Arnquist, David C.; Oonuma, Takehiko; Tahara, Hirotoshi; Sato, Naoto; Smith, Bradley P., Automated diagnostic analyzers having rear accessible track systems and related methods.
  5. Ochranek, Brian L.; Arnquist, David C.; Oonuma, Takehiko; Tahara, Hirotoshi; Sato, Naoto, Automated diagnostic analyzers having vertically arranged carousels and related methods.
  6. Ochranek, Brian L.; Arnquist, David C.; Oonuma, Takehiko; Tahara, Hirotoshi; Sato, Naoto, Automated diagnostic analyzers having vertically arranged carousels and related methods.
  7. Ammann, Kelly G.; Burns, Ralph E.; Hansberry, Ernest V.; Horner, Glenn A.; Jakub, Cheryl A.; Kling, John E.; Nieglos, Donald J.; Schneider, Robert E.; Smith, Robert J., Automated process for detecting the presence of a target nucleic acid in a sample.
  8. Ammann, Kelly G.; Burns, Ralph E.; Hansberry, Ernest V.; Horner, Glenn A.; Jakub, Cheryl A.; Kling, John E.; Nieglos, Donald J.; Schneider, Robert E.; Smith, Robert J., Automated process for detecting the presence of a target nucleic acid in a sample.
  9. Ammann, Kelly G.; Burns, Ralph E.; Hansberry, Ernest V.; Horner, Glenn A.; Jakub, Cheryl A.; Kling, John E.; Nieglos, Donald J.; Schneider, Robert E.; Smith, Robert J., Automated process for detecting the presence of a target nucleic acid in a sample.
  10. Ammann,Kelly G.; Burns,Ralph E.; Hansberry,Ernest V.; Horner,Glenn A.; Jakub,Cheryl A.; Kling,John E.; Nieglos,Donald J.; Schneider,Robert E.; Smith,Robert J., Automated process for detecting the presence of a target nucleic acid in a sample.
  11. Ammann, Kelly G.; Burns, Ralph E.; Hansberry, Ernest V.; Horner, Glenn A.; Jakub, Cheryl A.; Kling, John E.; Nieglos, Donald J.; Schneider, Robert E.; Smith, Robert J., Automated process for isolating and amplifying a target nucleic acid sequence.
  12. Kelly G. Ammann ; Ralph E. Burns ; Ernest V. Hansberry ; Glenn A. Horner ; Cheryl A. Jakub ; John E. Kling ; Donald J. Nieglos ; Robert E. Schneider ; Robert J. Smith, Automated process for isolating and amplifying a target nucleic acid sequence.
  13. Ammann,Kelly G.; Burns,Ralph E.; Hansberry,Ernest V.; Horner,Glenn A.; Jakub,Cheryl A.; Kling,John E.; Nieglos,Donald J.; Schneider,Robert E.; Smith,Robert J., Automated process for preparing and amplifying a target nucleic acid sequence.
  14. Ammann,Kelly G.; Burns,Ralph E.; Hansberry,Ernest V.; Horner,Glenn A.; Jakub,Cheryl A.; Kling,John E.; Nieglos,Donald J.; Schneider,Robert E.; Smith,Robert J., Automated system for isolating and amplifying a target nucleic acid sequence.
  15. Englhardt, Eric A.; Rice, Michael R.; Hudgens, Jeffrey C.; Hongkham, Steve; Pinson, Jay D.; Salek, Mohsen; Carlson, Charles; Weaver, William T; Armer, Helen R., Cartesian cluster tool configuration for lithography type processes.
  16. Rice, Mike; Hudgens, Jeffrey; Carlson, Charles; Weaver, William Tyler; Lowrance, Robert; Englhardt, Eric; Hruzek, Dean C.; Silvetti, Dave; Kuchar, Michael; Katwyk, Kirk Van; Hoskins, Van; Shah, Vinay, Cartesian robot cluster tool architecture.
  17. Ishikawa, Tetsuya; Roberts, Rick J.; Armer, Helen R.; Volfovski, Leon; Pinson, Jay D.; Rice, Michael; Quach, David H.; Salek, Mohsen S.; Lowrance, Robert; Backer, John A.; Weaver, William Tyler; Carlson, Charles; Wang, Chongyang; Hudgens, Jeffrey; Herchen, Harald; Lue, Brian, Cluster tool architecture for processing a substrate.
  18. Ishikawa, Tetsuya; Roberts, Rick J.; Armer, Helen R.; Volfovski, Leon; Pinson, Jay D.; Rice, Michael; Quach, David H.; Salek, Mohsen S.; Lowrance, Robert; Backer, John A.; Weaver, William Tyler; Carlson, Charles; Wang, Chongyang; Hudgens, Jeffrey; Herchen, Harald; Lue, Brian, Cluster tool architecture for processing a substrate.
  19. Ishikawa, Tetsuya; Roberts, Rick J.; Armer, Helen R.; Volfovski, Leon; Pinson, Jay D.; Rice, Michael; Quach, David H.; Salek, Mohsen S.; Lowrance, Robert; Backer, John A.; Weaver, William Tyler; Carlson, Charles; Wang, Chongyang; Hudgens, Jeffrey; Herchen, Harald; Lue, Brian, Cluster tool architecture for processing a substrate.
  20. Ishikawa,Tetsuya; Roberts,Rick J.; Armer,Helen R.; Volfovski,Leon; Pinson,Jay D.; Rice,Michael; Quach,David H.; Salek,Mohsen S.; Lowrance,Robert; Backer,John A.; Weaver,William Tyler; Carlson,Charles; Wang,Chongyang; Hudgens,Jeffrey; Herchen,Harald; Lue,Brian, Cluster tool architecture for processing a substrate.
  21. Volfovski, Leon; Ishikawa, Tetsuya, Cluster tool substrate throughput optimization.
  22. Lair, Gary D.; Nguyen, Thanh N.; Li, Haitao; Li, Florence; Knight, Byron J.; Heinz, Robert E.; Macioszek, Jerzy A.; Davis, Christopher B.; Scalese, Robert F., Continuous process for performing multiple nucleic acid amplification assays.
  23. Sanada, Masakazu; Harumoto, Masahiko; Kobayashi, Hiroshi; Matsunaga, Minobu, Developing apparatus and developing method.
  24. Sanada, Masakazu; Harumoto, Masahiko; Kobayashi, Hiroshi; Matsunaga, Minobu; Morita, Akihiko, Developing apparatus and developing method.
  25. Ammann,Kelly G.; Hansberry,Ernest V., Device for agitating the fluid contents of a container.
  26. Ochranek, Brian L.; Arnquist, David C., Diagnostic analyzers with pretreatment carousels and related methods.
  27. Endo, Masayuki; Sasago, Masaru, Exposure system and pattern formation method.
  28. Endo, Masayuki; Sasago, Masaru, Exposure system and pattern formation method.
  29. Fukuoka, Tetsuo; Akimoto, Masami; Kitano, Takahiro; Kimura, Yoshio; Hayashi, Shinichi; Ito, Hikaru, Heating apparatus, and coating and developing apparatus.
  30. Nakano, Katsushi; Okumura, Masahiko; Sugihara, Tarou; Mizutani, Takeyuki; Fujiwara, Tomoharu, Immersion lithographic apparatus rinsing outer contour of substrate with immersion space.
  31. Ammann,Kelly G.; Schneider,Robert E.; Smith,Robert J., Incubator for use in an automated diagnostic analyzer.
  32. Burns,Ralph E., Instrument for detecting light emitted by the contents of a reaction receptacle.
  33. Komiya, Takayuki; Nagashima, Shinji; Kojima, Shigeyoshi, Insulating film forming method and insulating film forming apparatus.
  34. Frost, David T.; Jones, Oliver David; Wallis, Mike, Integrated substrate processing system.
  35. Ammann, Kelly G.; Burns, Ralph E.; Hansberry, Ernest V.; Horner, Glenn A.; Jakub, Cheryl A.; Kling, John E.; Nieglos, Donald J.; Schneider, Robert E.; Smith, Robert J., Method and apparatus for performing a magnetic separation purification procedure on a sample solution.
  36. Kitano, Junichi; Matsuyama, Yuji; Kitano, Takahiro; Yaegashi, Hidetami, Method and system for coating and developing.
  37. Ammann, Kelly G.; Schneider, Robert E.; Smith, Robert J., Method for agitating the contents of a reaction receptacle within a temperature-controlled environment.
  38. Ammann, Kelly G.; Hansberry, Ernest V., Method for agitating the fluid contents of a container.
  39. Ammann, Kelly G.; Hansberry, Ernest V., Method for agitating the fluid contents of a container.
  40. Macioszek, Jerzy A.; Davis, Christopher B.; Lair, Gary D.; Nguyen, Thanh N.; Li, Haitao; Li, Florence F.; Knight, Byron J.; Scalese, Robert F.; Heinz, Robert E., Method for continuous mode processing of the contents of multiple reaction receptacles in a real-time amplification assay.
  41. Ammann, Kelly G.; Burns, Ralph E.; Hansberry, Ernest V.; Horner, Glenn A.; Jakub, Cheryl A.; Kling, John E.; Nieglos, Donald J.; Schneider, Robert E.; Smith, Robert J., Method for detecting the presence of a nucleic acid in a sample.
  42. Ammann, Kelly G.; Burns, Ralph E.; Hansberry, Ernest V.; Horner, Glenn A.; Jakub, Cheryl A.; Kling, John E.; Nieglos, Donald J.; Schneider, Robert E.; Smith, Robert J., Method for detecting the presence of a nucleic acid in a sample.
  43. Ammann, Kelly G.; Burns, Ralph E.; Hansberry, Ernest V.; Horner, Glenn A.; Jakub, Cheryl A.; Kling, John E.; Nieglos, Donald J.; Schneider, Robert E.; Smith, Robert J., Method for detecting the presence of a nucleic acid in a sample.
  44. Ammann, Kelly G.; Burns, Ralph E.; Hansberry, Ernest V.; Horner, Glenn A.; Jakub, Cheryl A.; Kling, John E.; Nieglos, Donald J.; Schneider, Robert E.; Smith, Robert J., Method for detecting the presence of a nucleic acid in a sample.
  45. Light, II, James P.; Carrick, James M., Method for determining the amount of an analyte in a sample.
  46. Ammann, Kelly G.; Schneider, Robert E.; Smith, Robert J., Method for incubating the contents of a receptacle.
  47. Ammann, Kelly G.; Schneider, Robert E.; Smith, Robert J., Method for introducing a fluid into a reaction receptacle contained within a temperature-controlled environment.
  48. Ammann, Kelly G.; Burns, Ralph E.; Hansberry, Ernest V.; Horner, Glenn A.; Jakub, Cheryl A.; Kling, John E.; Nieglos, Donald J.; Schneider, Robert E.; Smith, Robert J., Method for performing an assay with a nucleic acid present in a specimen.
  49. Macioszek, Jerzy A.; Davis, Christopher B.; Lair, Gary D.; Nguyen, Thanh N.; Li, Haitao; Li, Florence F.; Knight, Byron J.; Scalese, Robert F.; Heinz, Robert E., Method for performing multi-formatted assays.
  50. Light, II, James P., Method for reducing the presence of amplification inhibitors in a reaction receptacle.
  51. Ammann, Kelly G.; Burns, Ralph E.; Hansberry, Ernest V.; Horner, Glenn A.; Jakub, Cheryl A.; Kling, John E.; Nieglos, Donald J.; Schneider, Robert E.; Smith, Robert J., Method for simultaneously performing multiple amplification reactions.
  52. Knight, Byron J.; Opalsky, David; Schroeter, Brian, Method, system and apparatus for incorporating capacitive proximity sensing in an automated fluid transfer procedure.
  53. Burns,Ralph E.; Hansberry,Ernest V., Multiple ring assembly for providing specimen to reaction receptacles within an automated analyzer.
  54. Lair, Gary D.; Nguyen, Thanh N.; Li, Haitao; Li, Florence F.; Knight, Byron J.; Heinz, Robert E.; Macioszek, Jerzy A.; Davis, Christopher B.; Scalese, Robert F., Signal measuring system having a movable signal measuring device.
  55. Hamada, Tetsuya, Substrate processing apparatus.
  56. Hashimoto, Koji, Substrate processing apparatus.
  57. Yasuda, Shuichi; Kanaoka, Masashi; Kaneyama, Koji; Miyagi, Tadashi; Shigemori, Kazuhito; Asano, Toru; Toriyama, Yukio; Taguchi, Takashi; Mitsuhashi, Tsuyoshi; Okumura, Tsuyoshi, Substrate processing apparatus.
  58. Kaneyama, Koji; Hisai, Akihiro; Asano, Toru; Kobayashi, Hiroshi, Substrate processing apparatus and substrate processing method.
  59. Izumi, Akira, Substrate processing method and substrate processing apparatus.
  60. Nakano, Katsushi; Okumura, Masahiko; Sugihara, Tarou; Mizutani, Takeyuki; Fujiwara, Tomoharu, Substrate processing method, exposure apparatus, and method for producing device by immersing substrate in second liquid before immersion exposure through first liquid.
  61. Rice, Mike; Hudgens, Jeffrey; Carlson, Charles; Weaver, William Tyler; Lowrance, Robert; Englhardt, Eric; Hruzek, Dean C.; Silvetti, Dave; Kuchar, Michael; Van Katwyk, Kirk; Hoskins, Van; Shah, Vinay, Substrate processing sequence in a Cartesian robot cluster tool.
  62. Rice, Mike; Hudgens, Jeffrey; Carlson, Charles; Weaver, William Tyler; Lowrance, Robert; Englhardt, Eric; Hruzek, Dean C.; Silvetti, Dave; Kuchar, Michael; Katwyk, Kirk Van; Hoskins, Van; Shah, Vinay, Substrate processing sequence in a cartesian robot cluster tool.
  63. Rice, Mike; Hudgens, Jeffrey; Carlson, Charles; Weaver, William Tyler; Lowrance, Robert; Englhardt, Eric; Hruzek, Dean C.; Silvetti, Dave; Kuchar, Michael; Van Katwyk, Kirk; Hoskins, Van; Shah, Vinay, Substrate processing sequence in a cartesian robot cluster tool.
  64. Ammann, Kelly G.; Schneider, Robert E.; Smith, Robert J., System and method for incubating the contents of a reaction receptacle.
  65. Ammann, Kelly G.; Hansberry, Ernest V., System for agitating the fluid contents of a container.
  66. Ammann, Kelly G.; Schneider, Robert E.; Smith, Robert J., System for incubating the contents of a reaction receptacle.
  67. Knight, Byron J.; Li, Haitao, System for performing multi-formatted assays.
  68. Lair, Gary D.; Nguyen, Thanh N.; Li, Haitao; Li, Florence F.; Knight, Byron J.; Heinz, Robert E.; Macioszek, Jerzy A.; Davis, Christopher B.; Scalese, Robert F., System for performing multi-formatted assays.
  69. Knight, Byron J., System for processing contents of a receptacle to detect an optical signal emitted by the contents.
  70. Hayes, Matthew J.; Knight, Byron J.; Li, Haitao; Scalese, Robert F., Systems and methods for detecting multiple optical signals.
  71. Hayes, Matthew J.; Knight, Byron J.; Li, Haitao; Scalese, Robert F., Systems and methods for detecting multiple optical signals.
  72. Heinz, Robert E.; Newell, Dennis; Opalsky, David; Rhubottom, Jason, Systems and methods for distinguishing optical signals of different modulation frequencies in an optical signal detector.
  73. Heinz, Robert E.; Newell, Dennis; Opalsky, David; Rhubottom, Jason, Systems and methods for distinguishing optical signals of different modulation frequencies in an optical signal detector.
  74. Ammann, Kelly G.; Schneider, Robert E.; Smith, Robert J., Temperature-controlled incubator having a receptacle mixing mechanism.
  75. Ammann, Kelly G.; Schneider, Robert E.; Smith, Robert J., Temperature-controlled incubator having an arcuate closure panel.
  76. Ammann, Kelly G.; Schneider, Robert E.; Smith, Robert J., Temperature-controlled incubator having rotatable door.
  77. Hiroki, Tsutomu, Transfer apparatus and accommodating apparatus for semiconductor process, and semiconductor processing system.
  78. Ammann, Kelly G., Transport mechanism.
  79. Lester, Paul; Meyer, Scott; Atkins, Wyland L.; Richards, Douglas; Predoaica, Constantin; Hudgens, Jeffrey; Carlson, Charles; Kankanala, Penchala; Rice, Mike; Papanu, James S.; Baiya, Evanson G.; Rosato, John J., Wet clean system design.
섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트