초록 ▼

A system is disclosed for checking gas pressure and gas leakage in one or more gas cylinders. The system particularly detects the state of gas pressure in a gas cylinder during ion-implantation, monitors for the existence of any gas leaks in the gas cylinders, and informs the manufacture process man

A system is disclosed for checking gas pressure and gas leakage in one or more gas cylinders. The system particularly detects the state of gas pressure in a gas cylinder during ion-implantation, monitors for the existence of any gas leaks in the gas cylinders, and informs the manufacture process manager of the results of checking and monitoring using a communications device. This minimizes any loss of time due to equipment stoppage and protecting workers from any poisonous gas leaks. This improved system includes one or more gas checking units for checking gas pressure in one or more gas cylinders and detecting gas leaks from the one or more gas cylinders; a signal processor for processing information received from the one or more gas checking units and converting the information into a signal format suitable for transmission; a transmitting unit for transmitting the converted signal received from the signal processor along a communications line; and a display for displaying information based on the transmitted signal.

대표청구항 ▼

[ What is claimed is:] [1.] A system for providing gas and checking gas pressure and gas leakage, the system comprising:two or more gas cylinders;two or more gas checking units for respectively checking gas pressure in the two or more gas cylinders, for respectively detecting gas leaks from the two

[ What is claimed is:] [1.] A system for providing gas and checking gas pressure and gas leakage, the system comprising:two or more gas cylinders;two or more gas checking units for respectively checking gas pressure in the two or more gas cylinders, for respectively detecting gas leaks from the two or more gas cylinders, and for generating two or more data signals indicating the pressure measured by the respective gas checking units, and any detection of a gas leak by respective gas checking units;a signal processor for receiving the two or more data signals and converting the two or more data signals into a single converted signal having a format suitable for transmission;a transmitting unit for transmitting the converted signal received from the signal processor along a communications line; anda display for displaying information based on the transmitted converted signal.