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|국가/구분||United States(US) Patent 등록|
|미국특허분류(USC)||141/098 ; 414/217|
|발명자 / 주소|
|출원인 / 주소|
|대리인 / 주소||
|인용정보||피인용 횟수 : 24 인용 특허 : 3|
A valve seated within a SMIF pod support platform is disclosed for activating and deactivating the flow of gas to a pod on the platform. In preferred embodiments, the valve includes a central poppet capable of moving between a first, closed position where the poppet blocks the flow of gas through the valve, and a second, open position where the poppet allows gas flow through the valve. In the absence of a pod on the support platform, pressurized gas from the gas source downstream of the valve biases the poppet into the first position to thereby block gas...
[ We claim:] [1.] A system for purging a carrier with a gas from a gas source as the carrier is in contact with a support surface, comprising:a valve capable of being mounted within the support platform so that a portion of said valve protrudes past the support surface in the absence of a force biasing said portion into said surface, the valve is capable of occupying a first state where the gas is prevented from passing through the valve and a second state where the gas passes through the valve to purge the carrier;wherein a force exerted by the carrier ...