초록 ▼

A valve seated within a SMIF pod support platform is disclosed for activating and deactivating the flow of gas to a pod on the platform. In preferred embodiments, the valve includes a central poppet capable of moving between a first, closed position where the poppet blocks the flow of gas through th

A valve seated within a SMIF pod support platform is disclosed for activating and deactivating the flow of gas to a pod on the platform. In preferred embodiments, the valve includes a central poppet capable of moving between a first, closed position where the poppet blocks the flow of gas through the valve, and a second, open position where the poppet allows gas flow through the valve. In the absence of a pod on the support platform, pressurized gas from the gas source downstream of the valve biases the poppet into the first position to thereby block gas flow. In this first position, a top portion of the poppet extends slightly above the upper surface of the pod support platform. When a pod is seated on the support platform, the weight of the pod moves the poppet from its first position to its second position where gas is allowed to flow through the valve and into the pod to allow purging of the pod.

대표청구항 ▼

[ We claim:] [1.] A system for purging a carrier with a gas from a gas source as the carrier is in contact with a support surface, comprising:a valve capable of being mounted within the support platform so that a portion of said valve protrudes past the support surface in the absence of a force bias

[ We claim:] [1.] A system for purging a carrier with a gas from a gas source as the carrier is in contact with a support surface, comprising:a valve capable of being mounted within the support platform so that a portion of said valve protrudes past the support surface in the absence of a force biasing said portion into said surface, the valve is capable of occupying a first state where the gas is prevented from passing through the valve and a second state where the gas passes through the valve to purge the carrier;wherein a force exerted by the carrier on said portion of said valve protruding past said support surface is capable of actuating said valve from said first state to said second state.