초록 ▼

Disclosed is a piezoelectric system which demonstrates piezoelectric properties over a large temperature range of from room temperature to approximately 1360 degrees centigrade. The piezoelectric system is sequentially comprised of a first electrically conductive layer, a layer of (Ta.sub.2 O.sub.5)

Disclosed is a piezoelectric system which demonstrates piezoelectric properties over a large temperature range of from room temperature to approximately 1360 degrees centigrade. The piezoelectric system is sequentially comprised of a first electrically conductive layer, a layer of (Ta.sub.2 O.sub.5) in other than a monoclinic phase, (preferably orthorhombic demonstrating small x-ray crystalographic and peaks), and a second electrically conductive layer. A preferred method of fabrication involves sputter deposition of both said layer of (Ta.sub.2 O.sub.5) and said second electrically conductive layer.

대표청구항 ▼

[ What is claimed is:] [1.] A piezoelectric system which demonstrates piezoelectric properties over a large temperature range, said piezoelectric system being sequentially comprised of a first electrically conductive means, a layer of Ta.sub.2 O.sub.5 in other than a monoclinic phase, and a second e

[ What is claimed is:] [1.] A piezoelectric system which demonstrates piezoelectric properties over a large temperature range, said piezoelectric system being sequentially comprised of a first electrically conductive means, a layer of Ta.sub.2 O.sub.5 in other than a monoclinic phase, and a second electrically conductive means, such that when said piezoelectric system is subjected to stress a voltage appears between said first and second electrically conductive means, and such that when a voltage is applied between said first and second electrically conductive means said piezoelectric system is caused to flex.