초록 ▼

A substrate processing apparatus reduces an instantaneous maximum power consumption at turn-on. Power receiving parts of a plurality of processing units are connected to one end of a turn-on switch respectively through switches. The other end of the turn-on switch is connected to an external power s

A substrate processing apparatus reduces an instantaneous maximum power consumption at turn-on. Power receiving parts of a plurality of processing units are connected to one end of a turn-on switch respectively through switches. The other end of the turn-on switch is connected to an external power source through a breaker. Timer values are set in advance in the timers, respectively. When the turn-on switch is turned on, the timers turn on the associated switches respectively after times which are defined by the timer values, whereby the processing units are provided with electric power, each with a delay of a constant time.

대표청구항 ▼

[ We claim:] [1.] An apparatus for processing a substrate, comprising:a) a plurality of processing portions each for applying predetermined processing to a substrate;b) turn-on means which is connected to an external power source which is disposed outside said apparatus; andc) power supply controlli

[ We claim:] [1.] An apparatus for processing a substrate, comprising:a) a plurality of processing portions each for applying predetermined processing to a substrate;b) turn-on means which is connected to an external power source which is disposed outside said apparatus; andc) power supply controlling means for providing each one of said plurality of processing portions with electric power which is supplied from said external power source through said turn-on means, said power supply controlling means comprising:c-3) a plurality of switch means each connected between said turn-on means and each one of said plurality of processing portions;c-4) power measuring means for measuring total electric power which is being used at said plurality of processing portions; andc-5) switch controlling means for sequentially turning on said plurality of switch means in accordance with a measurement which is obtained by said power measuring means, said switch controlling means selecting an objective processing portion from said plurality of processing portions in accordance with a difference between a maximum allowable level which is set in advance and said measurement, and turns on one of said switch means which corresponds to said objective processing portion which is selected from said plurality of processing portions,wherein at turn-on by said turn-on means, said power supply controlling means sequentially provides said plurality of processing portions with said electric power using time intervals.