초록 ▼

An improved cold cathode emitter based on carbon nanotubes has been developed by inserting into the conventional process an extra step in which the diameter of the gate aperture is temporarily reduced by means of a conformally deposited sacrificial layer. This reduced diameter aperture is then used

An improved cold cathode emitter based on carbon nanotubes has been developed by inserting into the conventional process an extra step in which the diameter of the gate aperture is temporarily reduced by means of a conformally deposited sacrificial layer. This reduced diameter aperture is then used as a mask for the deposition of the catalytic layer. The latter is then converted to a discontinuous layer either by selective etching or by heating until agglomeration occurs. The sacrificial layer is removed, following which carbon nanotubes are grown upwards from the catalytic layer in the normal manner. Because of the greater distance between the tubes and the gate aperture that this process provides, a more reliable product is obtained.

대표청구항 ▼

[ What is claimed is:] [1.] A process for forming a cold cathode emitter, comprising:providing a substrate and then successively depositing on said substrate a first conducting layer, a catalyst substrate layer, a dielectric layer, and a second conducting layer;patterning and etching the second cond

[ What is claimed is:] [1.] A process for forming a cold cathode emitter, comprising:providing a substrate and then successively depositing on said substrate a first conducting layer, a catalyst substrate layer, a dielectric layer, and a second conducting layer;patterning and etching the second conductive layer and dielectric down to the level of the catalyst substrate layer, then selectively over-etching the dielectric layer so as to undercut the second conductive layer, thereby forming an emitter cavity whose topmost layer is a gate electrode having a gate aperture with a first internal diameter;depositing a sacrificial layer onto the gate electrode, whereby the gate aperture is given a second internal diameter that is less than said first diameter;using the gate aperture as a mask, depositing a layer of a catalytic material on said catalyst substrate layer;selectively removing the sacrificial layer;converting said layer of catalytic material to a discontinuous layer of island areas;forming an array of carbon nanotubes, having tips, by growing the nanotubes vertically upwards from said island areas; andterminating formation of the nanotube array when said tips are level with the gate aperture.