[특허]Supercritical phase wafer drying/cleaning system

Supercritical phase wafer drying/cleaning system 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	F26B-003/00
출원번호	US-0023290 (1998-02-13)
발명자 / 주소	Farmer Robert B. Jones Bernard D. Gupta Kedar P. Jafri Ijaz H. Dispensa Derek M.
출원인 / 주소	G.T. Equipment Technologies, Inc.
대리인 / 주소	Maine
인용정보	피인용 횟수 : 82 인용 특허 : 0

초록 ▼

An apparatus and method for drying a microelectronic structure on wafer substrate using supercritical phase gas techniques and a unique pressure vessel locking mechanism. There is lid and a base with an open cavity to contain at least one microelectronic structure on wafer substrate. Clamping the lid to the base uses locking clamp rings with open jaws large to partially enclose the edge of the vessel. The clamp rings are supported symmetrically about the sides of the vessel. The rings are adjusted between an open position where the rings are clear of the vessel and a locking position where the jaws partially enclose the vessel. The jaws and the vessel share a tapered cam plate and roller system configured to bring the rings into vertically compressive locking engagement on the pressure vessel when the rings are moved into locking position. Mechanical interlocks provide security against back pressure opening the rings. The invention includes the necessary mechanisms and systems for manual or automatic closing and clamping the vessel, controlling pressure in the cavity, controlling temperature in the cavity, flowing process fluid through the cavity, venting the cavity, unclamping the pressure vessel, and removing the lid.

대표청구항 ▼

[ What is claimed is:] [1.] An apparatus for drying a microelectronic structure on wafer substrate, comprisinga pressure vessel with a lid and a base with an open cavity, said cavity being of uniform diameter and constant depth sufficient to contain at least one said microelectronic structure on wafer substrate, said vessel when closed comprising said lid emplaced on said base,means for placing said lid on said base,means for clamping said lid to said base, said means comprising at least two locking clamp rings, each said ring having an open jaw sufficiently large to partially enclose an edge of said vessel when closed, said rings supported symmetrically about the circumference of said vessel and oriented with said jaws facing said vessel, said rings movable between an open position where said rings are clear of said vessel and a locking position where said jaws partially enclose said vessel, said jaws and said vessel further comprising a tapered cam plate and roller system configured to bring said rings into vertically compressive locking engagement on said pressure vessel when said rings are moved into said locking position,means for controlling pressure in said cavity,means for controlling temperature in said cavity,means for flowing process fluid through said cavity,means for venting said cavity,means for unclamping said pressure vessel, andmeans for removing said lid from said base.

이 특허를 인용한 특허 (82)

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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

내보내기 구분	파일저장 인쇄 메일전송
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연합인증

Supercritical phase wafer drying/cleaning system 원문보기

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Supercritical phase wafer drying/cleaning system 원문보기

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연구과제 타임라인

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