초록 ▼

The change in thickness of a film on an underlying body such as a semiconductor substrate is monitored in situ by inducing a current in the film, and as the thickness of the film changes (either increase or decrease), the changes in the current are detected. With a conductive film, eddy currents are

The change in thickness of a film on an underlying body such as a semiconductor substrate is monitored in situ by inducing a current in the film, and as the thickness of the film changes (either increase or decrease), the changes in the current are detected. With a conductive film, eddy currents are induced in the film by a generating an alternating electromagnetic field with a sensor which includes a capacitor and an inductor.

대표청구항 ▼

[ What is claimed is:] [5.] A method of monitoring, in-situ and in real time, an increase in thickness of a conductive film on an underlying body, the method comprising the steps of:(a) inducing an eddy current in the film with a sensor proximate the film; and(b) detecting a change in the current du

[ What is claimed is:] [5.] A method of monitoring, in-situ and in real time, an increase in thickness of a conductive film on an underlying body, the method comprising the steps of:(a) inducing an eddy current in the film with a sensor proximate the film; and(b) detecting a change in the current due to the change in thickness of the film,said inducing and detecting steps being performed during the change in thickness of the film, thereby providing real-time monitoring of the change in thickness of the film.