초록 ▼

A polishing system and a method of control of the same enabling reliable transfer of the workpieces into and out of the system while maintaining the precision of polishing of the workpieces. Provision is made of a polishing apparatus 1, a first transfer apparatus 2, a second transfer apparatus 3, an

A polishing system and a method of control of the same enabling reliable transfer of the workpieces into and out of the system while maintaining the precision of polishing of the workpieces. Provision is made of a polishing apparatus 1, a first transfer apparatus 2, a second transfer apparatus 3, and a control apparatus 4. In the polishing apparatus 1, workpieces W held in m number of holding holes 14 formed in n number of carriers 14 are polished on their two surfaces by a lower platen 10 and an upper platen 19. The control apparatus 4 finds the revolution angle of the carriers 14 when the workpieces reach the desired thickness, makes the carriers revolve until the revolution angle of a whole multiple of 360.degree./n closest to the revolution angle found, and then makes the polishing apparatus 1 stop. Further, it finds the rotation angle of the carriers after stopping and makes mounters 24 and 34 of a loader 23 and unloader 33 rotate by exactly that rotation angle so as to transfer the workpieces W into and out from the carriers 14.

대표청구항 ▼

[ We claim:] [1.] A polishing system comprising:a polishing unit having a rotatable lower platen, a sun gear able to rotate about a center of the lower platen, a rotatable internal gear arranged concentrically at the outside of the sun gear, n number of carriers having around the center thereof m nu

[ We claim:] [1.] A polishing system comprising:a polishing unit having a rotatable lower platen, a sun gear able to rotate about a center of the lower platen, a rotatable internal gear arranged concentrically at the outside of the sun gear, n number of carriers having around the center thereof m number of holding holes formed at 360.degree./m intervals and arranged around the center of the sun gear at 360.degree./n intervals in a state engaged with said sun gear and internal gear, and an upper platen able to rotate in an opposite direction to the lower platen in a state gripping workpieces in the holding holes of the carriers together with the lower platen;a first transfer unit having a loader movable at the polishing unit side, n number of mounters provided on the loader in an array corresponding to the n number of carriers and able to rotate, m number of chucks mounted on said mounters in an array corresponding to the m number of holding holes, and a rotating mechanism provided on the loader and enabling said n number of mounters to rotate all together, the first transfer unit picking up the unpolished workpieces by the chucks and transferring them into the holding holes formed in the carriers of the polishing unit;a second transfer unit having an unloader movable from the polishing unit side, n number of mounters provided on the unloader in an array corresponding to the n number of carriers and able to rotate, m number of chucks mounted on said mounters in an array corresponding to the m number of holding holes, and a rotating mechanism provided on the unloader and enabling said n number of mounters to rotate all together, the second transfer unit taking out the polished workpieces by the chucks from the holding holes of the carriers and transferring them to a predetermined location; anda control unit making the carriers revolve to a revolution angle of a whole multiple of 360.degree./n closest to a revolution angle of the carriers and stopping the polishing unit at the time when the workpieces become the desired thickness, finding a rotation angle of the carriers at the stopped position, and controlling the rotating mechanisms of the loader and unloader to make the mounters of the loader and unloader rotate by exactly that rotation angle.