초록 ▼

The invention achieves these and other objects by providing a gas handling device that includes an elongate track having a pair of laterally spaced and longitudinally extending channels extending generally along the length of the track. The device further includes a plurality of gas handling units w

The invention achieves these and other objects by providing a gas handling device that includes an elongate track having a pair of laterally spaced and longitudinally extending channels extending generally along the length of the track. The device further includes a plurality of gas handling units which are slidably mounted along the length of the track and selectively securable thereon without requiring alteration to the track or the units. Spool pieces and supports therefor are coupled to the first and last gas handling unit mounted on the track to establish communication with field tubing to deliver and remove a flow of process gas to and from the gas handling units. A method for mounting gas handling units on the device is also disclosed.

대표청구항 ▼

[ What is claimed is:] [1.] A method for mounting gas handling units on a gas handling device, without requiring alteration of the device or the gas handling units, to provide and regulate a flow of gas to a semiconductor manufacturing apparatus having an inlet for receiving the flow of gas, the met

[ What is claimed is:] [1.] A method for mounting gas handling units on a gas handling device, without requiring alteration of the device or the gas handling units, to provide and regulate a flow of gas to a semiconductor manufacturing apparatus having an inlet for receiving the flow of gas, the method comprising:providing a gas handling device having an elongate track including a pair of laterally spaced and longitudinally extending channels with openings extending along a substantial portion of the length thereof and a plurality of gas handling units each having an inlet port, an outlet port and a mounting surface;slidably engaging a first one of the plurality of gas handling units on the track, wherein the mounting surface of the gas handling unit engages and is slidable along the track;securing the first gas handling unit in a desired position on the track without requiring alteration of the track or the gas handling unit;slidably engaging a second one of the plurality of gas handling units on the track in a spaced-apart relationship to the first gas handling unit, wherein the mounting surface of the second gas handling unit engages and is slidable along the track;establishing communication between the inlet port of the first gas handling unit with the outlet port of the second gas handling unit; andsecuring the second gas handling unit in a second desired position on the track without requiring alteration of the track or the second gas handling unit.