초록 ▼

A liquid reagent dispensing assembly, comprising a gas-pressurizable vessel including a floor, and an interior volume bounded by interior wall and floor surfaces. A dip-tube liquid discharge conduit is employed for discharging liquid from the gas-pressurized vessel. The vessel is provided with a liq

A liquid reagent dispensing assembly, comprising a gas-pressurizable vessel including a floor, and an interior volume bounded by interior wall and floor surfaces. A dip-tube liquid discharge conduit is employed for discharging liquid from the gas-pressurized vessel. The vessel is provided with a liquid level sensor for sensing liquid reagent level in the vessel interior volume. The floor of the vessel has a cavity therein extending downwardly from the surface of the floor, and the lower end of the dip tube is positioned in the cavity. The dispensing assembly of the invention may usefully be employed for dispensing of reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices, and achieves a high level of withdrawal of the reagent liquid from the vessel.

대표청구항 ▼

[ What is claimed is:] [1.] A liquid reagent dispensing assembly, comprising:a gas-pressurizable vessel including a floor, and an interior volume bonded by interior wall and floor surfaces,a dip tube liquid discharge conduit for discharging liquid from the gas-pressurized vessel, wherein the dip tub

[ What is claimed is:] [1.] A liquid reagent dispensing assembly, comprising:a gas-pressurizable vessel including a floor, and an interior volume bonded by interior wall and floor surfaces,a dip tube liquid discharge conduit for discharging liquid from the gas-pressurized vessel, wherein the dip tube extends downwardly in the interior volume of the vessel to a lower end of the dip tube disposed in a lower portion of the interior volume,a liquid level sensor for sensing liquid reagent level in the vessel interior volume,the floor of the vessel having a sump cavity therein extending downwardly from the surface of the floor,the lower end of the dip tube being positioned in said sump cavity, andthe liquid level sensor comprising a sensor element extending downwardly and terminating at a lower end that is positioned in said sump cavity.