초록 ▼

A vacuum pump a the magnetic bearing assembly includes the magnetic bearing assembly with rotor position sensors and backup bearings being placed inside the rotatable shaft of the vacuum pump. The sensor placements are independent of the bearing position, so that the respective radial sensors can be

A vacuum pump a the magnetic bearing assembly includes the magnetic bearing assembly with rotor position sensors and backup bearings being placed inside the rotatable shaft of the vacuum pump. The sensor placements are independent of the bearing position, so that the respective radial sensors can be at the same axial position as the respective radial bearings, which provides sensors co-location and a space saving within a turbopump housing, in particular, in its axial direction, while sensors and mechanical backup bearings are placed in a better protected area with respect to pumped corrosive gases.

대표청구항 ▼

[ What is claimed is:] [1.] A vacuum turbopump with a magnetic bearing assembly for supporting and maintaining a rotating shaft disposed coaxially within a chamber formed by a vacuum turbopump housing, said assembly comprising:a supporting post disposed coaxially within an interior of said rotating

[ What is claimed is:] [1.] A vacuum turbopump with a magnetic bearing assembly for supporting and maintaining a rotating shaft disposed coaxially within a chamber formed by a vacuum turbopump housing, said assembly comprising:a supporting post disposed coaxially within an interior of said rotating shaft and being rigidly connected to said vacuum turbopump housing, said supporting post having at least one radially extending bore and a longitudinally extending bore;at least a radial and an axial sensor placed within respective radially and longitudinally extending bores in said supporting post for detecting the displacement of said rotating shaft with respect to said supporting post;at least a radial and an axial actuatorplaced within said chamber, wherein a number of said actuators corresponds to a number of said sensors; andsaid radial actuator is positioned in one cross-sectional plane with the corresponding radial sensor.