초록 ▼

The present invention provides an electrochemical system and process for the production of very high purity hydride gases and the feed product streams including these hydride gases at constant composition over extended periods of time. The processes and apparatuses of the invention can employ a line

The present invention provides an electrochemical system and process for the production of very high purity hydride gases and the feed product streams including these hydride gases at constant composition over extended periods of time. The processes and apparatuses of the invention can employ a lined pressure vessel (1) within which resides an electrochemical cell including cathode (2) and anode (3) material. The hydride gas produced within the vessel exits through port (4) to a manifold which contains automatic valve (8) to allow exit of the hydride gas. The hydride gas passes through one or more filters (7). The gas finally exits the manifold through a pressure regulator (6) to the point where it is utilized in semiconductor fabrication. A source of gas (11) for mixing with the hydride gas is also included.

대표청구항 ▼

[ What is claimed is:] [1.] A method for consistent composition delivery of a product gas stream including a hydride gas, comprising:electrochemically generating a first gas feed stream including a hydride gas, said first gas feed stream having a varying level of the hydride gas over time;mixing sai

[ What is claimed is:] [1.] A method for consistent composition delivery of a product gas stream including a hydride gas, comprising:electrochemically generating a first gas feed stream including a hydride gas, said first gas feed stream having a varying level of the hydride gas over time;mixing said first gas feed stream with a second gas including a diluent gas, to form a product gas stream including a level of the diluent gas and a level of the hydride gas;monitoring the level of the diluent gas and the hydride gas in said product gas stream; andexecuting control software for maintaining a predetermined ratio of said hydride gas to said diluent gas in said product stream over time, the execution of said control software causing variation in an amount of said second gas provided to said mixing step in response to said monitored level, so as to form said product gas having said predetermined ratio of gases. [21.] A system for consistent composition delivery of a product gas stream including a hydride gas, the system comprising:an electrolytic cell for generating a first gas feed including a hydride gas;a controllable source for delivering a second gas feed including a diluent gas so as to mix said second gas feed and said first gas feed to produce a product gas stream;means for obtaining a first signal proportional to a ratio of hydride gas and diluting gas in said product gas stream;digital signal processing means for processing the first signal and producing a second signal; andwherein said controllable source for delivering a second gas feed varies the level of said second gas feed in response to said second signal, so as to maintain a substantially constant ratio of the hydride gas and the diluent gas in the product stream over time.