초록 ▼

A robotic arm assembly in a transport module is expansible to have an effector at its end receive a substrate in a cassette module and is then contracted and rotated with the effector to have the effector face a process module. Planets on a turntable in the process module are rotatable on first para

A robotic arm assembly in a transport module is expansible to have an effector at its end receive a substrate in a cassette module and is then contracted and rotated with the effector to have the effector face a process module. Planets on a turntable in the process module are rotatable on first parallel axes. The turntable is rotatable on a second axis parallel to the first axes to move successive planets to a position facing the effector. At this position, an alignment assembly is aligned with, but axially displaced from, one of the planets. This assembly is moved axially into coupled relationship with such planet and then rotated to a position aligning the substrate on the effector axially with such planet when the arm assembly is expanded. A lifter assembly aligned with, and initially displaced from, such planet is moved axially to lift the substrate from the effector. The arm assembly is then contracted, rotated with the effector and expanded to receive the next cassette module substrate. The lifter assembly is then moved axially to deposit the substrate on the planet. When the substrates have been deposited on the planets, the planets are individually rotated on the first axes by a stator rotatable on the second axis with the turntable. Guns having a particular disposition relative to the planets provide controlled depositions on the substrates during such planet rotations. The planets and the end effector hold the substrates at peripheral positions displaced from the controlled substrate depositions.

대표청구항 ▼

[ What is claimed is:] [1.] In a method of producing a controlled deposition on a non-cylindrical substrate, the steps of:receiving the substrate from a cassette module,transferring the substrate on an end effector to a process module in displaced relationship to a particular axis,rotating a planet,

[ What is claimed is:] [1.] In a method of producing a controlled deposition on a non-cylindrical substrate, the steps of:receiving the substrate from a cassette module,transferring the substrate on an end effector to a process module in displaced relationship to a particular axis,rotating a planet, on an axis displaced from the particular axis, to a position for receiving the substrate on the particular axis,transferring the substrate on the end effector into the process module to the particular axis,rotating the planet on the particular axis to a position for the reception of the non-cylindrical substrate by the planet,lifting the substrate on the particular axis from the end effector,moving the end effector from the process module after the lifting of the substrate from the end effector, andmoving the substrate on the particular axis to the planet.