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This is a system and method of forming a conductive polymer optical coating on an infrared detection system. The apparatus may include an upper vacuum chamber, a shutter assembly mounted inside the upper vacuum chamber, a substrate holder disposed inside the shutter assembly, wherein the shutter ass

This is a system and method of forming a conductive polymer optical coating on an infrared detection system. The apparatus may include an upper vacuum chamber, a shutter assembly mounted inside the upper vacuum chamber, a substrate holder disposed inside the shutter assembly, wherein the shutter assembly is capable of shielding or exposing the substrate to the upper vacuum chamber, an orifice connected to the upper vacuum chamber for control of a flow rate for the upper vacuum chamber, a first mechanical pump system connected to the orifice, a lower vacuum chamber connected to the upper vacuum chamber on a side opposite the shutter assembly, an electron beam assembly for providing a low-melting-point electrical conductor vapor, disposed inside the lower vacuum chamber, wherein the electron beam assembly is directed toward the shutter assembly in the upper vacuum chamber, a second mechanical pump system and a cryopump connected to the lower vacuum chamber, a polymer generation chamber for providing polymer vapor, connected to the upper vacuum chamber on a side perpendicular to the shutter assembly, a vaporizer surrounding a first portion of the polymer generation chamber, a pyrolysis furnace surrounding a second portion of the polymer generation chamber, and a post pyrolysis heater surrounding a third portion of the polymer generation chamber.

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[ We claim:] [1.] A method of making an infrared sensing integrated circuit, comprising:fabricating a substrate which includes a plurality of electrically conductive elements, and including a plurality of thermally sensitive elements which are each disposed over a respective one of said electrically

[ We claim:] [1.] A method of making an infrared sensing integrated circuit, comprising:fabricating a substrate which includes a plurality of electrically conductive elements, and including a plurality of thermally sensitive elements which are each disposed over a respective one of said electrically conductive elements; andforming an infrared absorptive, conductive-polymer coating on said substrate, above all of said thermally sensitive elements by:generating a low-melting-point electrical conductor vapor;generating a polymer vapor with a pyrolysis furnace;mixing said electrical conductor vapor and said polymer vapor in a first vacuum chamber;exposing said substrate to said vapors to allow deposition of said vapors on said substrate; andashing said conductive-polymer coating after said exposing said substrate to said vapors, in order to facilitate infrared absorption by said conductive-polymer layer.