초록 ▼

A deformable structure is subjected to a plurality of reduced pressures, causing a bulge in the surface of the deformable structure above a separation in the deformable structure. The cross sectional area of the bulge is measured for each reduced pressure in a plane parallel to the surface of the de

A deformable structure is subjected to a plurality of reduced pressures, causing a bulge in the surface of the deformable structure above a separation in the deformable structure. The cross sectional area of the bulge is measured for each reduced pressure in a plane parallel to the surface of the deformable structure. When the cross sectional area of the bulge does not increase with a reduction in the pressure, the cross sectional area of the bulge approximates the area of the separation. The depth of the separation is calculated using the change in cross sectional area of the bulge per change in pressure.

대표청구항 ▼

[ What is claimed is:] [1.] A method of determining depth of a defect in a test object, the method comprising the steps of:(a) varying pressure in a vicinity of the test object, while simultaneously obtaining a plurality of interferograms of the object, so as to generate defect indication areas, on

[ What is claimed is:] [1.] A method of determining depth of a defect in a test object, the method comprising the steps of:(a) varying pressure in a vicinity of the test object, while simultaneously obtaining a plurality of interferograms of the object, so as to generate defect indication areas, on said interferograms, the defect indication areas having diameters which depend on pressure;(b) measuring a rate of change in said diameters relative to changes in pressure; and(c) determining depth of the defect according to the result of step (b).