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Pendulum valve assembly 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F16K-003/04
  • F16K-031/04
출원번호 US-0339084 (1999-06-23)
발명자 / 주소
  • Olmsted Richard W.
출원인 / 주소
  • MKS Instruments, Inc.
대리인 / 주소
    McDermott, Will & Emery
인용정보 피인용 횟수 : 49  인용 특허 : 21

초록

A pendulum valve assembly comprises a housing including an interior space and a pair of openings through which fluid can enter and exit the interior space; a valve seat disposed in the interior space around the edge of a first of the openings; a disk mounted relative to the housing so that the disk

대표청구항

[ What is claimed is:] [1.] A pendulum valve assembly comprising:a housing including an interior space and a pair of openings through which fluid can enter and exit the interior space;a valve seat disposed in the interior space around the edge of a first of said openings;a valve body including a dis

이 특허에 인용된 특허 (21)

  1. Ehmig Gerhard (Feldkirch-Tosters ATX) Vogt Karl (Buchs CHX), All-metal lift valve for high-vacuum applications.
  2. Marugg Leo,CHX, Control apparatus for controlling gas flow in a molecular region.
  3. Pankov Ivan (Willowbrook IL), Double-seal flexible gate valve.
  4. Boeckman Paul A. (Glenpool OK) Young Dennis L. (Tulsa OK), High pressure cam seal valve.
  5. Wheeler William R. (Saratoga CA), High vacuum gate valve.
  6. Wheeler William R. (Saratoga CA), High vacuum gate valve.
  7. Schertler Siegfried (Haag CHX), Metallic sealing device for a high-vacuum closure.
  8. Hoffmann Otto-Horst (Rodenbach DEX) Heil Walter (Neuberg DEX) Stark Friedrich (Langenselbold DEX), Operating mechanism for valves, gates and the like.
  9. Anderle ; Fritz ; Frey ; Gerhard ; Grein ; Lutz ; Reimpell ; Uwe ; Stark ; Friedrich, Oscillating slide valve.
  10. Bsch Hubert (Lustenau ATX), Pipe valve assembly with metal valve slide for high vacuum installations.
  11. Thorn Walter (Friedrichshafen DEX), Pivotal slide valve.
  12. Dern Charles D. (Feasterville PA) Ho David L. (Hatboro PA), Rotary disk valve.
  13. Erwin ; Robert L., Rotary plug valve.
  14. Bsch Hubert (Lustenau ATX), Sealing device for a high-vacuum closure.
  15. Geiser Friedrich (Nziders ATX), Shut-off valves for pipelines.
  16. Brida Hubert (Gotzis ATX), Slide valve.
  17. Schertler Siegfried (Haag CH), Sliding device for the gas-tight and air-tight closure of a container opening or of a conduit.
  18. Erwin ; deceased Robert L. (Farmington NM by Josiephine Reed Erwin ; Personal Representative), Tapered rotary plug valve.
  19. Davis ; Jr. James C. (Carlisle MA), Valve.
  20. Ehmig ; Gerhard, Valve arrangement for a vacuum line.
  21. Geiser Friedrich (Nziders ATX), Valve slide.

이 특허를 인용한 특허 (49)

  1. Wark Rickey E. ; Nardi John Anthony, Burner isolation valve for pulverized fuel systems.
  2. Blanchard, Stephane Pierre Guillaume; Dakowski, Mathieu; Daris, Thomas; Lunel, Romain Nicolas, Cooling air bleed device in a turbine engine.
  3. Blanchard, Stephane Pierre Guillaume; Dakowski, Mathieu; Daris, Thomas; Lunel, Romain Nicolas, Cooling air bleed device in a turbomachine.
  4. Blanchard, Stephane Pierre Guillaume; Dakowski, Mathieu; Daris, Thomas; Lunel, Romain Nicolas, Device for tapping cooling air in a turbomachine.
  5. Huang, Shu-Mei, Double sealing valve.
  6. Maher Joseph, Dual pendulum valve assembly.
  7. Joseph Ashurst Maher, Jr., Dual pendulum valve assembly with valve seat cover.
  8. Litomisky,Ivan; Litomisky,Petr; Litomisky,Ales, Energy saving vacuum system for particle, mist, and fume collection.
  9. Lucas, Paul D.; Hill, Gordon; Pisera, Jaroslaw Wojciech, Fluid control valves.
  10. Ichio Ito JP, Gate valve.
  11. Ishigaki, Tsuneo, Gate valve apparatus.
  12. Kazuhito Watanabe JP; Yoshihiro Katsumata JP; Nobuyuki Takahashi JP, Gate valve apparatus.
  13. Hiroki,Tsutomu, Gate valve apparatus for vacuum processing system.
  14. Blanchard, Stéphane Pierre Guillaume; Daris, Thomas, Gate valve for a system for circulating cooling air through a turbomachine.
  15. Boger,Michael S.; Murphy,Daimhin Paul; Bailey,Christopher M.; Enomoto,Yoshihiro, Integrated high vacuum pumping system.
  16. Guzorek, Steven E.; Weiss, Cory A., Linear slide damper system.
  17. Ding, Junhua; Benedict, Scott; Pisera, Jaroslaw, Method and apparatus for multiple-channel pulse gas delivery system.
  18. Dhindsa, Rajinder; Antolik, Jerrel K.; Stevenot, Scott, Methods and apparatuses for controlling gas flow conductance in a capacitively-coupled plasma processing chamber.
  19. Sin, Pheng, Multi-vane throttle valve.
  20. Geiser, Friedrich, Pendulum and slide gate vacuum valve.
  21. Brenes,Arthur J., Pendulum gate valve.
  22. Lucas, Paul D., Pendulum valve assembly.
  23. Coleman, Nate; Slaney, John; Mallory, Sean; Cederstav, Per; Kruse, David; Ballard, William; Woods, Robert, Pendulum valve having independently and rapidly controllable theta-and z-axis motion.
  24. Cheng,Shiyuan (Denny), Pendulum valve with a full range of position control.
  25. Abatchev, Mirzafer; Rusu, Camelia; McMillin, Brian, Pressure control valve assembly of plasma processing chamber and rapid alternating process.
  26. Eto, Hideo; Saito, Makoto; Nishiyama, Nobuyasu, Pressure controlling apparatus.
  27. Williams, Dick S.; Luter, William L., Retractable and expandable water cooled valve gate useful for sealing a hot processing chamber.
  28. Schuster, Bernd; Schwarz, Bernd; Nikles, Rufold, Rotary slide.
  29. Lucas, Paul D., Seal ring for pendulum valve assembly.
  30. Ehrne, Florian, Shuttle valve having two drives.
  31. Blahnik,Jeff; Kraus,Joe; Rice,Mike, Single-sided inflatable vertical slit valve.
  32. Taguchi, Tatsuhiro; Kogame, Masahito, Slide valve.
  33. Tsuneo Ishigaki JP; Ikuo Kanzaka JP; Kenji Waragai JP, Swing-door gate valve.
  34. Ding, Junhua, System for and method of fast pulse gas delivery.
  35. Ding, Junhua; L'Bassi, Michael; Lee, Tseng-Chung, System for and method of fast pulse gas delivery.
  36. Ding, Junhua, System for and method of multiple channel fast pulse gas delivery.
  37. Seitz, Daniel, Vacuum gate valve having a limb element.
  38. Blecha, Thomas, Vacuum slide gate valve.
  39. Bohm, Christoph; Steffen, Roman, Vacuum valve.
  40. Geiser, Friedrich; Neumeir, Anton; Duelli, Berhard; Blecha, Thomas; Summer, Karlheinz, Vacuum valve and closure member for closing a flow path in a gas-tight manner by means of a linear movement.
  41. Litscher,Bernhard; Blecha,Thomas, Vacuum valve drive.
  42. Netzer, Martin; Seitz, Daniel; Sonderegger, Harald, Vacuum valve for controlling a flow and for interrupting a flow path.
  43. Ehrne, Florian, Vacuum valve with gas-tight shaft penetration.
  44. Lucas,Paul D.; Pisera,Jaroslaw W., Valve assembly having improved pump-down performance.
  45. Lucas,Paul D.; Carbone,Anthony J., Valve assembly having novel flow characteristics.
  46. Geiser, Friedrich, Valve essentially gastight closing of a flow path.
  47. Geiser,Friedrich, Valve for essentially gastight closing a flow path.
  48. Lamprecht, Michael; Weiss, Wolfgang, Valve for the substantially gas-tight interruption of a flow path.
  49. Kane, Dale Robert; Minowa, Norihisa; Takahashi, Kohtaro, Valve seal assembly.
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