초록 ▼

A semiconductor device handler with a temperature controlled test area. Temperature control is provided in part through the use of temperature controlled air forced across the test area. For heating the test area, electrical resistance heaters are uniformly distributed through the test area and are

A semiconductor device handler with a temperature controlled test area. Temperature control is provided in part through the use of temperature controlled air forced across the test area. For heating the test area, electrical resistance heaters are uniformly distributed through the test area and are controlled to provide the desired temperature. The handler has a close pitch between adjacent sockets such that is not possible to distribute refrigeration elements over the test area. Instead, a refrigeration element is placed on one side of the test area. To prevent formation of an undesirable temperature gradient, heat is injected at a specific location in the test area.

대표청구항 ▼

[ What is claimed is:] [1.] Apparatus having a region that is desired t o be maintained at a uniform temperature, comprising:a) a plate with the region disposed thereon, said plate having a first end and a second end;b) a first cold source thermally coupled to the plate;c) a second cold source therm

[ What is claimed is:] [1.] Apparatus having a region that is desired t o be maintained at a uniform temperature, comprising:a) a plate with the region disposed thereon, said plate having a first end and a second end;b) a first cold source thermally coupled to the plate;c) a second cold source thermally coupled to the plate between the region and the second end;d) at least one temperature sensor coupled to the plate; ande) a heat source thermally coupled to the plate between the region and the second cold source.