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특허 상세정보

Cryopump

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B01D-008/00   
미국특허분류(USC) 620/555 ; 41/790.1
출원번호 US-0242006 (1999-02-05)
우선권정보 DE-0032123 (1996-08-16)
국제출원번호 PCT/EP97/01183 (1997-03-08)
§371/§102 date 19990205 (19990205)
국제공개번호 WO-9806943 (1998-02-19)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Wall Marjama Bilinski & Burr
인용정보 피인용 횟수 : 5  인용 특허 : 13
초록

The invention relates to a cryopump having pump surfaces which are held at different temperatures during operation and are disposed in a housing with a flange for connecting the housing to a vacuum chamber. Additional pump surfaces are provided for the accumulation of easily condensable gases and improve the suction performance of the cryopump. These additional pump surfaces are disposed in the vacuum chamber and are connected to a first stage of a two stage refrigeration head via a cold bridge.

대표
청구항

[ What is claimed is:] [1.] A cryopump including a housing with a first flange for connecting the housing to a vacuum chamber, said cryopump comprising:a plurality of pump surfaces disposed within said housing that are held at different temperatures;at least one additional pump surface disposed outside said housing;a refrigerator having a refrigeration head disposed within said housing, said refrigeration head having at least two stages including a first stage; andat least one cold bridge for connecting said at least one additional pump surface to said f...

이 특허에 인용된 특허 (13)

  1. Welch Kimo M. (Mountain View CA). Cryogenic device for restricting the pumping speed of selected gases. USP1981084285710.
  2. Mattern-Klosson Monika (Roesrath DEX) Mundinger Hans-Juergen (Bruehl DEX) Haefner Hans-Ulrich (Cologne DEX) Timm Uwe (Frankfurt DEX). Cryogenic pump with an essentially cup-shaped housing. USP1996085542257.
  3. Miura Kazuo (Nara JPX) Kang Yoon M. (Sakai JPX) Taneya Shoichi (Sakai JPX) Noguchi Satoshi (Sakai JPX) Sakitani Katsumi (Kawachinagano JPX). Cryogenic refrigeration system for cooling a specimen. USP1989054827736.
  4. Kohler Marcel (Egerta 517 FL-9496 Balzers LIX). Cryopump. USP1994095343709.
  5. Mattern-Klosson Monika (Roesrath DEX) Mundinger Hans-Juergen (Bruehl DEX) Greger Ferdinand (Cologne DEX). Cryopump. USP1995115465584.
  6. Matsuda Toshiharu (Kudamatsu JPX) Saho Norihide (Yamaguchi JPX) Imamura Minoru (Yamaguchi JPX) Hosomi Nobuyuki (Hikari JPX). Cryopump and method of operating same. USP1987054667477.
  7. Bchler Werner (Rsrath DEX) Forth Hans-Joachim (Cologne DEX) Klein Hans-Hermann (Rsrath DEX) Strasser Wilhelm (Bergisch Gladbach DEX). Cryopump, and a method for the operation thereof. USP1988074757689.
  8. Amos Richard D. (Surrey GB2) Power Basil D. (Crawley GB2) Robson Francis C. (Crawley GB2). Cryopumps. USP1988044736591.
  9. Bchler Werner (Rsrath DEX) Forth Hans-Joachim (Cologne DEX) Klein Hans-Hermann (Rsrath DEX). Method of starting and/or regenerating a cryopump and a cryopump therefor. USP1986094614093.
  10. Matte Stephen R. (Norfolk MA) Andeen Bruce R. (Boxborough MA). Shielded cryogenic trap. USP1996075537833.
  11. Hfner Hans-Ulrich (Cologne DEX) Klein Hans-Hermann (Friedberg DEX) Timm Uwe (Frankfurt DEX). Two-stage cryopump. USP1992055111667.
  12. Duza Peter J. (1576 Chambers Dr. San Jose CA 95118). Vacuum cryopump with improved first stage. USP1989034815303.
  13. Bazaj Dipak K. (Tucson AZ) Swartz David L. (Westerville OH). Vibration damped cryogenic apparatus. USP1988054745761.