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Equipment for producing thin-film solar cell 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-014/34
출원번호 US-0274311 (1999-03-23)
우선권정보 JP-0299797 (1996-10-25)
발명자 / 주소
  • Kushiya Katsumi,JPX
  • Tachiyuki Muneyori,JPX
  • Kase Takahisa,JPX
출원인 / 주소
  • Showa Shell Sekiyu K.K., JPX
대리인 / 주소
    Sughrue, Mion, Zinn, Macpeak & Seas, PLLC
인용정보 피인용 횟수 : 116  인용 특허 : 7

초록

A thin-film light absorbing layer which is regulated so as to have any desired gallium concentration and which is capable of attaining a high open-circuit voltage is formed by a simple method at a temperature lower than the softening point of the soda-lime float glass. A light absorbing layer is for

대표청구항

[ What is claimed is:] [1.] An equipment for producing a thin-film light absorbing layer for a thin-film solar cell, said equipment comprising a sputtering part for forming a stacked precursor film comprising a layer of a copper-gallium alloy and an indium layer on a metallic back electrode layer fo

이 특허에 인용된 특허 (7)

  1. Adam Helmut (Stuttgart DT) Lutz Hans (Stuttgart DT) Siegle Gert (Hildesheim DT), Apparatus for concurrently sputtering different materials.
  2. Thornton ; deceased John A. (late of Champaign IL by Joy Crane Thornton ; legal representative) Lommasson Timothy (Champaign IL) Rockett Angus (Champaign IL), Hybrid method for depositing semi-conductive materials.
  3. Ermer James H. (Los Angeles CA) Love Robert B. (Chatsworth CA), Method for forming Cu In Se2 films.
  4. Love Robert B. (Chatsworth CA) Choudary Uppala V. (Chatsworth CA), Method for forming photovoltaic cells employing multinary semiconductor films.
  5. Hedstrm Jonas (Stockholm SEX), Method for manufacturing solar cells.
  6. Mickelsen Reid A. (Bellevue WA) Chen Wen S. (Seattle WA), Methods for forming thin-film heterojunction solar cells from I-III-VI2 chalcopyrite compounds, and solar.
  7. Pollock Gary A. (Canoga Park CA) Mitchell Kim W. (Granada Hills CA) Ermer James H. (Burbank CA), Thin film solar cell and method of making.

이 특허를 인용한 특허 (116)

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  79. Wieting, Robert D., Patterned thin film photovoltaic module.
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