초록 ▼

A cryopump-type water-vapor removal system comprising a vacuum chamber for location within a device-fabrication cleanroom or other similar fabrication area, and a Meissner-type cryocoil for condensation of atmospheric water vapor in the atmosphere inside the chamber. A refrigerant compressor-evapora

A cryopump-type water-vapor removal system comprising a vacuum chamber for location within a device-fabrication cleanroom or other similar fabrication area, and a Meissner-type cryocoil for condensation of atmospheric water vapor in the atmosphere inside the chamber. A refrigerant compressor-evaporator is for location outside the device-fabrication cleanroom and is separated from the cryocoil by at least twenty feet. A refrigerant umbilical cord connects between and includes a flexible outer sheath providing for maintaining a thermal-insulation vacuum within. Flexible smooth-bore refrigerant suction and discharge tubes are disposed in the thermal-insulation vacuum of the umbilical. The suction tube has a larger diameter than the discharge to provide for an expansion of the refrigerant that occurs in the cryocoil. Non-turbulent flow through the suction and discharge tubes in the refrigerant umbilical cord may be controlled by use of a smooth-bore wall. Inside-to-outside thermal conduction may be controlled by disposing the suction and discharge tubes inside the thermal-insulation vacuum and reflective aluminized MYLAR (super insulation).

대표청구항 ▼

[ What is claimed is:] [1.] A vacuum-insulated refrigerant line, comprising:a non-collapsible flexible outer sheath for maintaining a thermal-insulation vacuum within;a vacuum manifold and end cap that are sealed to opposite ends of a flexible outer sheath, and each providing side-by-side discharge

[ What is claimed is:] [1.] A vacuum-insulated refrigerant line, comprising:a non-collapsible flexible outer sheath for maintaining a thermal-insulation vacuum within;a vacuum manifold and end cap that are sealed to opposite ends of a flexible outer sheath, and each providing side-by-side discharge and suction tube connections, and further providing a vacuum-port for a vacuum-pump that generates said thermal-insulation vacuum;a flexible smooth-bore refrigerant discharge tube disposed in the flexible outer sheath and for providing a flow of refrigerant from a refrigerant compressor-evaporator, and connected at each end to said discharge tube connections; anda flexible smooth-bore refrigerant suction tube disposed in said vacuum-insulation and for providing for a flow of refrigerant from said refrigerant compressor-evaporator and connected at each end to said suction tube connections;wherein, no intermediate joints are included and said flexible smooth-bore refrigerant discharge tube and supply tube are allowed to move freely inside the flexible outer sheath; andwherein, the thermal leakage to the outside environment is less than one British Thermal Unit (BTU), per linear foot of said refrigerant line, per hour.