|국가/구분||United States(US) Patent 등록|
|미국특허분류(USC)||620/507 ; 13/811.4|
|발명자 / 주소|
|대리인 / 주소||
|인용정보||피인용 횟수 : 25 인용 특허 : 17|
A cryopump-type water-vapor removal system comprising a vacuum chamber for location within a device-fabrication cleanroom or other similar fabrication area, and a Meissner-type cryocoil for condensation of atmospheric water vapor in the atmosphere inside the chamber. A refrigerant compressor-evaporator is for location outside the device-fabrication cleanroom and is separated from the cryocoil by at least twenty feet. A refrigerant umbilical cord connects between and includes a flexible outer sheath providing for maintaining a thermal-insulation vacuum wi...
[ What is claimed is:] [1.] A vacuum-insulated refrigerant line, comprising:a non-collapsible flexible outer sheath for maintaining a thermal-insulation vacuum within;a vacuum manifold and end cap that are sealed to opposite ends of a flexible outer sheath, and each providing side-by-side discharge and suction tube connections, and further providing a vacuum-port for a vacuum-pump that generates said thermal-insulation vacuum;a flexible smooth-bore refrigerant discharge tube disposed in the flexible outer sheath and for providing a flow of refrigerant fr...