초록 ▼

To cope with recent LCD or PDP of larger size, an efficient transfer technology is demanded in manufacturing a larger substrate. It calls for a transfer method for such larger substrate with a less required space, and a substrate transfer cassette enabling such method. A technology is disclosed, whi

To cope with recent LCD or PDP of larger size, an efficient transfer technology is demanded in manufacturing a larger substrate. It calls for a transfer method for such larger substrate with a less required space, and a substrate transfer cassette enabling such method. A technology is disclosed, which comprises a substrate transfer cassette (50) containing a plurality of substrates, a dolly (55) for loading the substrate transfer cassette (50), and a plurality of cassette holders (70) having a rotating arm (71) which can rotate in the vertical direction, wherein a substrate cassette (50) is transferred from a position near another cassette holder to a position near a destination cassette holder with the dolly (55), raised by the rotating arm (71) on the destination cassette holder (70) from the lower section to the upper section of the dolly (55), and moved from the dolly (55) to the cassette holder (70).

대표청구항 ▼

[ What is claimed is:] [1.] A substrate transfer method comprising the steps of:moving a dolly to a location near a cassette holder having a rotating arm located within said cassette holder, the dolly loading a substrate transfer cassette containing substrates; andtransferring the substrates in a st

[ What is claimed is:] [1.] A substrate transfer method comprising the steps of:moving a dolly to a location near a cassette holder having a rotating arm located within said cassette holder, the dolly loading a substrate transfer cassette containing substrates; andtransferring the substrates in a state in which the substrate transfer cassette is raised and held with said rotating arm by actuating said rotating arm.