초록 ▼

A turbo-molecular vacuum pump comprising alternate first and second stages. The first stage comprises a plurality of blades arranged in an annular envelope with the blades depending radially from a disc and being angled about radial lines out of the plane of the disc. The second stage comprises a pl

A turbo-molecular vacuum pump comprising alternate first and second stages. The first stage comprises a plurality of blades arranged in an annular envelope with the blades depending radially from a disc and being angled about radial lines out of the plane of the disc. The second stage comprises a plurality of coaxial, concentric frusto-conical members arrayed in a plane parallel to that of the annular envelope such that at least some of the blades and at least some of the frusto-conical members are axially aligned and are adapted to remain so during rotation of one stage relative to the other.

대표청구항 ▼

[ We claim:] [1.] A turbo-molecular vacuum pump comprising:alternate first and second stages; the first stage comprising a plurality of blades arranged in an annular envelope with the blades depending radially from a disc and being angled about radial lines out of the plane of the disc; andthe secon

[ We claim:] [1.] A turbo-molecular vacuum pump comprising:alternate first and second stages; the first stage comprising a plurality of blades arranged in an annular envelope with the blades depending radially from a disc and being angled about radial lines out of the plane of the disc; andthe second stage comprising a plurality of co-axial, concentric frustoconical members arrayed in a plane parallel to that of the annular envelope such that at least some of the blades and at least some of the frusto-conical members are axially aligned and are adapted to remain so during rotation of one stage relative to the other.