초록 ▼

A low concentration gas delivery system utilizing a sorbent-based gas storage and delivery unit including a gas storage and dispensing vessel joined in flow communication with a permeation structure. The storage and dispensing vessel contains a solid-phase physical sorbent medium holding a fluid, wh

A low concentration gas delivery system utilizing a sorbent-based gas storage and delivery unit including a gas storage and dispensing vessel joined in flow communication with a permeation structure. The storage and dispensing vessel contains a solid-phase physical sorbent medium holding a fluid, which is selectively dispensed from the vessel by pressure differential, concentration differential and/or thermal desorption techniques. The dispensed gas flows to the permeation structure, wherein the desorbed fluid is diffusionally released either as a neat fluid, or into a carrier gas in which the desorbed fluid has a precisely maintained concentration, for applications such as calibration of instruments monitoring fluid concentrations, delivery of dopants for fabrication of microelectronic device structures, or other end use application requiring a precise low concentration of fluid.

대표청구항 ▼

[ What is claimed is:] [1.] A method of delivering a low concentration fluid to a process for utilization of same, said process comprising:providing a storage and dispensing vessel containing a solid-phase physical sorbent medium sorptively retaining thereon a fluid having sorptive affinity for the

[ What is claimed is:] [1.] A method of delivering a low concentration fluid to a process for utilization of same, said process comprising:providing a storage and dispensing vessel containing a solid-phase physical sorbent medium sorptively retaining thereon a fluid having sorptive affinity for the physical sorbent medium;selectively desorbing fluid from said physical sorbent medium and discharging same from said vessel;flowing the discharged fluid to a diffusional permeation structure;diffusing the fluid through the diffusional permeation structure; anddischarging the diffused fluid at a selected concentration;controllably maintaining concentration of said diffused fluid at said selected concentration, by a controller operatively coupled with (a) means for selectively heating at least one of the vessel and diffusional permeation structure, (b) first flow control means for controlling flow of fluid from the vessel to the diffusional permeation structure, (c) second flow control means for controlling flow of diffused fluid from the diffusional permeation structure, and (d) sensing means for sensing pressure of at least one of fluid flowed from the vessel to the diffusional permeation structure and diffused fluid flowed from the diffusional permeation structure, wherein said controller is operated to adjustably control at at least one of said means (a), (b) and (c) in response to pressure sensing of said means (d).