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Protective coating by high rate arc plasma deposition 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-016/40
출원번호 US-0036776 (1998-03-09)
발명자 / 주소
  • Yang Barry Lee-Mean
  • Gasworth Steven Marc
출원인 / 주소
  • General Electric Company
대리인 / 주소
    Maddry
인용정보 피인용 횟수 : 62  인용 특허 : 25

초록

A method for depositing adherent metal oxide-based protective coatings on glass, metal, and plastic substrates by arc plasma deposition.

대표청구항 ▼

[ What is claimed is:] [1.] A method for depositing an adherent coating onto the surface of a substrate by plasma deposition which comprises passing a plasma gas through a direct current arc plasma generator to form a plasma, injecting a reactant gas and an oxidant into a diverging nozzle-injector e

이 특허에 인용된 특허 (25)

  1. Reed Clive W. (Scotia NY) Rzad Stefan J. (Rexford NY) Devins John C. (Burnt Hills NY), Abrasion-resistant plastic articles.
    상세보기
  2. Reed Clive W. (Scotia NY) Rzad Stefan J. (Rexford NY) Devins John C. (Burnt Hills NY), Abrasion-resistant plastic articles and method for making them.
    상세보기
  3. Hu Ing-Feng (Midland MI) Tou James C. (Midland MI), Apparatus for plasma enhanced chemical vapor deposition comprising shower head electrode with magnet disposed therein.
    상세보기
  4. Schuurmans Hubertus J. A. (Amsterdam NLX) Werner Jan (Amsterdam NLX) Schram Daniel C. (Eindhoven NLX) Kroesen Gerardus M. W. (Eindhoven NLX), Apparatus for plasma surface treating and preparation of membrane layers.
    상세보기
  5. Knowles Steven C. (Seattle WA) Kull Alan E. (Seattle WA) Butler George W. (Seattle WA) King David O. (Woodinville WA), Apparatus for synthesizing diamond films utilizing an arc plasma.
    상세보기
  6. Smith William W. (Seattle WA) Knowles Steven C. (Seattle WA), Arcjet thruster with improved arc attachment for enhancement of efficiency.
    상세보기
  7. Wallstn Hans I. (Denens MO CHX) Yasuda Hirotsugu K. (Columbia MO), Cascade arc plasma torch and a process for plasma polymerization.
    상세보기
  8. Hu Ing-Feng ; O'Connor Paul J. ; Tou James C. ; Sedon James H. ; Bales Stephen E. ; Perettie Donald J., Coated plastic substrate.
    상세보기
  9. Quirk George ; Raney Daniel V. ; Heuser Michael Scott ; Shepard ; Jr. C. B., Gas injection disc assembly for CVD applications.
    상세보기
  10. Petrmichl Rudolph H. (Center Valley PA) Knapp Bradley J. (Kutztown PA) Kimock Fred M. (Macungie PA) Daniels Brian K. (Emmaus PA), Highly abrasion-resistant, flexible coatings for soft substrates.
    상세보기
  11. Cappelli Mark A. (Mountain View CA) Loh Michael H. (Menlo Park CA), Method and apparatus for growing diamond films.
    상세보기
  12. Devins John C. (Burnt Hills NY) Reed Clive W. (Scotia NY) Rzad Stefan J. (Rexford NY), Method for forming abrasion-resistant polycarbonate articles, and articles of manufacture produced thereby.
    상세보기
  13. Schuurmans Hubertus J. A. (Amsterdam NLX) Werner Jan (Amsterdam NLX) Schram Daniel C. (Eindhoven NLX) Kroesen Gerardus M. W. (Eindhoven NLX), Method for plasma surface treating and preparation of membrane layers.
    상세보기
  14. Vukanovic Vladimir (Rochester NY) Butler Susannah M. (Rochester NY) Fazekas George (Rochester NY) Miller John R. (Rochester NY), Method for the deposition of coatings upon substrates utilizing a high pressure, non-local thermal equilibrium arc plasm.
    상세보기
  15. Hu Ing-Feng (Midland MI) Tou James C. (Midland MI), Method of forming a plasma polymerized film.
    상세보기
  16. Muehlberger Erich, Method of forming uniform thin coatings on large substrates.
    상세보기
  17. Rzad Stefan J. (Rexford NY) Conley Douglas J. (Scotia NY) Reed Clive W. (Scotia NY), Method of preparing UV absorbant and abrasion-resistant transparent plastic articles.
    상세보기
  18. Hu, Ing-Feng; Tou, James C., Method of providing an abrasion resistant coating.
    상세보기
  19. Schram Daniel C. (MB Eindhoven NLX) Kroesen Gerardus M. W. (MB Eindhoven NLX), Method of treating surfaces of substrates with the aid of a plasma.
    상세보기
  20. Webber Roderick P. (Elkhart IN), Nozzle for plasma torch and method for introducing powder into the plasma plume of a plasma torch.
    상세보기
  21. Matsumoto Minoru (Tsukuba JPX) Ogino Etsuo (Tsukuba JPX) Tsuno Toshio (Tsukuba JPX), Plasma CVD method.
    상세보기
  22. Fabel Arthur J. (Amherst MA), Plasma flame spray gun method and apparatus with adjustable ratio of radial and tangential plasma gas flow.
    상세보기
  23. Henne Rudolf (Boeblingen DEX) Weber Winfried (Leinfelden-Echterdingen DEX) Schiller Guenter (Gerlingen DEX) Schnurnberger Werner (Stuttgart DEX) Kabs Michael (Hanau DEX), Process for applying ceramic coatings using a plasma jet carrying a free form non-metallic element.
    상세보기
  24. Bergmann Erich (Mels CHX) Hummer Elmar (Satteins ATX), Process for depositing layers on substrates in a vacuum chamber.
    상세보기
  25. Hu Ing-Feng (Midland MI) Tou James C. (Midland MI), Protective film for articles and method.
    상세보기

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  1. Yang, Barry Lee-Mean; Iacovangelo, Charles Dominic; Browall, Kenneth Walter; Gasworth, Steven Marc; Morrison, William Arthur; Johnson, James Neil, Apparatus and method for large area chemical vapor deposition using multiple expanding thermal plasma generators.
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  2. Felts, John T.; Fisk, Thomas E.; Abrams, Robert S.; Ferguson, John; Freedman, Jonathan R.; Pangborn, Robert J.; Sagona, Peter J., Apparatus and method for transporting a vessel to and from a PECVD processing station.
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  3. Barry Lee-Mean Yang ; Charles Dominic Iacovangelo ; Kenneth Walter Browall ; Steven Marc Gasworth ; William Arthur Morrison ; James Neil Johnson, Apparatus for large area chemical vapor deposition using multiple expanding thermal plasma generators.
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  4. Plischke,Juergen Kurt; De La Veaux,Stephan Claude; Frerichs,Scott Rickbeil; Witt,Jodi Lynn; Normand,Christian, Apparatus for making metal oxide nanopowder.
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  5. Boulos,Maher I.; Jurewicz,Jerzy W.; Nessim,Christine A. Abdel Messih, Apparatus for plasma synthesis of metal oxide nanopowder.
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  6. Ahn, Kie Y.; Forbes, Leonard, Apparatus having a lanthanum-metal oxide semiconductor device.
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  7. Larson-Smith, Kjersta L.; Pare, Shawn M.; Sundaram, Vasan S., Barrier coatings for polymeric substrates.
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  8. Schaepkens, Marc, Barrier layer for an article and method of making said barrier layer by expanding thermal plasma.
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  9. Fisk, Thomas E., Coating inspection method.
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  10. Kim, Hyung-Jun; Kweon, Young-Gak, Cold spray apparatus having powder preheating device.
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  11. Weikart, Christopher; Clark, Becky L.; Stevenson, Adam; Abrams, Robert S.; Belfance, John, Controlling the uniformity of PECVD deposition.
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  12. Weikart, Christopher; Clark, Becky L.; Stevenson, Adam; Abrams, Robert S.; Belfance, John; Jones, Joseph A.; Fisk, Thomas E., Controlling the uniformity of PECVD deposition on medical syringes, cartridges, and the like.
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  13. Felts, John T.; Fisk, Thomas E.; Abrams, Robert S.; Ferguson, John; Freedman, Jonathan R.; Pangborn, Robert J.; Sagona, Peter J., Cyclic olefin polymer vessels and vessel coating methods.
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  14. Borst,Keith M.; Gallucci,Robert R.; Iacovangelo,Charles D.; LeGrand,Donald G., Data storage medium and method for the preparation thereof.
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  15. Gallucci,Robert R.; Iacovangelo,Charles D.; LeGrand,Donald G.; Wilson,James R., Data storage medium and method for the preparation thereof.
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  16. Sandhu, Gurtej S.; Durcan, D. Mark, Devices with nanocrystals and methods of formation.
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  17. Sandhu, Gurtej S.; Durcan, D. Mark, Devices with nanocrystals and methods of formation.
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  18. Iacovangelo, Charles D.; Miebach, Thomas; Mercedes, Michael W.; Gasworth, Steven M.; Haag, Michael R., Expanding thermal plasma deposition system.
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  19. Yang, Barry Lee-Mean, Fluid injector for and method of prolonged delivery and distribution of reagents into plasma.
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  20. Ahn, Kie Y.; Forbes, Leonard, Gallium lanthanide oxide films.
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  21. Ahn, Kie Y.; Forbes, Leonard, Gallium lanthanide oxide films.
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  22. Ahn, Kie Y.; Forbes, Leonard, Gallium lathanide oxide films.
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  23. Chen, Meng; Gasworth, Steven M.; Grandhee, Sunitha; Sargent, Johathan Ross, Glazing system for vehicle tops and windows.
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  25. Ristoski,Tony; McMaken,Marc A.; Brewster,Christopher A.; Korchnak,Gregory J., Injectable structural adhesive.
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  26. Anthony A. Parker ; Peter J. Rohrbacher ; Scott M. Wootten ; John A. Shost ; Richard A. Sabo ; Robert Dempsey, Laminated glass floor tile and flooring made therefrom and method for making same.
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  27. Ahn, Kie Y.; Forbes, Leonard, Lanthanide doped TiOx films.
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  28. Ahn, Kie Y.; Forbes, Leonard, Low-temperature grown high quality ultra-thin CoTiO3 gate dielectrics.
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  29. Ahn, Kie Y.; Forbes, Leonard, Low-temperature grown high quality ultra-thin CoTiOgate dielectrics.
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  30. Fisk, Thomas E.; Sagona, Peter J.; Jones, Joseph A., Method and apparatus for detecting rapid barrier coating integrity characteristics.
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  31. Matsumoto, Takashi; Imazu, Chitake; Hagihara, Shigeru; Kijima, Kazuhiro; Abe, Osamu; Hiraki, Satoshi; Fujikawa, Yuichiro, Method and apparatus for manufacturing a zinc oxide thin film at low temperatures.
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  32. Suzuki, Toshio, Method for producing ink jet recording head, and ink jet recording head produced by such method.
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  33. Ahn, Kie Y.; Forbes, Leonard, Method of fabricating an apparatus having a lanthanum-metal oxide dielectric layer.
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  34. Shirahata, Takahiro; Orita, Hiroyuki; Yoshida, Akio; Kogura, Masahisa, Method of forming zinc oxide film (ZnO) or magnesium zinc oxide film (ZnMgO) and apparatus for forming zinc oxide film or magnesium zinc oxide film.
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  35. Kushalappa, Poovanna Theethira; Marur, Sudhakar Ramamoorthy; Ramalingam, Hariharan; Golakrishanan, Sadasivam, Method of manufacturing a functionally graded article.
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  36. Sheel, David William; Pemble, Martyn, Methods for preparing titania coatings by plasma CVD at atmospheric pressure.
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  37. Ahn, Kie Y.; Forbes, Leonard, Methods of forming an insulating metal oxide.
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  38. Sharan,Sujit; Sandhu,Gurtej S., Methods of forming silicon dioxide layers, and methods of forming trench isolation regions.
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  39. Sharan,Sujit; Sandhu,Gurtej S., Methods of forming silicon dioxide layers, and methods of forming trench isolation regions.
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  40. Gouskov, Mikhail I.; Danilov, Evguenie B.; Aslami, Mohd A.; Wu, Dau, Multiple torch—multiple target method and apparatus for plasma outside chemical vapor deposition.
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  41. Felts, John T.; Fisk, Thomas E.; Kinney, Shawn; Weikart, Christopher; Hunt, Benjamin; Raiche, Adrian; Fitzpatrick, Brian; Sagona, Peter J.; Stevenson, Adam, PECVD coating methods for capped syringes, cartridges and other articles.
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  42. Jones, Joseph A.; Felts, John T.; Gresham, James Troy; Lilly, Brian Russell; Fisk, Thomas E., PECVD lubricity vessel coating, coating process and apparatus providing different power levels in two phases.
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  43. Felts, John T.; Fisk, Thomas E.; Abrams, Robert S.; Ferguson, John; Freedman, Jonathan R.; Pangborn, Robert J.; Sagona, Peter J.; Weikart, Christopher, Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus.
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  44. Korevaar,Bastian A.; Iacovangelo,Charles D.; Miebach,Thomas; Mercedes,Michael W., Plasma coating system for non-planar substrates.
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  45. Jones, Joseph A.; Weikart, Christopher; Martin, Steven J., Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus.
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  46. Boulos,Maher I.; Jurewicz,Jerzy W.; Nessim,Christine A. Abdel Messih, Plasma synthesis of metal oxide nanopowder and apparatus therefor.
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  47. Heinrich Grunwald DE; Thomas Schulte DE; Klaus Nauenburg DE; Wilfried Dicken DE; Rudolf Beckmann DE, Process for coating plastic substrates.
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  48. Plischke, Juergen Kurt; de la Veaux, Stephan Claude; Frerichs, Scott Rickbeil; Witt, Jodi Lynn; Normand, Christian, Process for making metal oxide nanoparticles.
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  49. Nakajima, Tatsuji, Process for producing laminated film, and reflection reducing film.
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  50. Barry Lee-Mean Yang ; Steven Marc Gasworth, Protective coating by high rate arc plasma deposition.
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  51. Borst,Keith M.; Gallucci,Robert R.; Iacovangelo,Charles D.; LeGrand,Donald G., Reflective article and method for the preparation thereof.
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  52. Gallucci,Robert R.; Iacovangelo,Charles D.; LeGrand,Donald G.; Wilson,James R., Reflective article and method for the preparation thereof.
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  53. Schaepkens,Mark; Iacovangelo,Charles Dominic; Miebach,Thomas, Replaceable plate expanded thermal plasma apparatus and method.
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  54. Felts, John T.; Fisk, Thomas E.; Abrams, Robert S.; Ferguson, John; Freedman, Jonathan R.; Pangborn, Robert J.; Sagona, Peter; Weikart, Christopher; Israelachvili, Jacob, Saccharide protective coating for pharmaceutical package.
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  55. Ahn, Kie Y.; Forbes, Leonard, Titanium aluminum oxide films.
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  56. Weikart, Christopher; Clark, Becky L.; Stevenson, Adam; Felts, John T., Trilayer coated pharmaceutical packaging.
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  57. Weikart, Christopher; Clark, Becky L.; Stevenson, Adam; Felts, John T., Trilayer coated pharmaceutical packaging.
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  59. Felts, John T.; Fisk, Thomas E.; Abrams, Robert S.; Ferguson, John; Freedman, Jonathan R.; Pangborn, Robert J.; Sagona, Peter J., Vessel inspection apparatus and methods.
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  60. Felts, John T.; Fisk, Thomas E.; Abrams, Robert S.; Ferguson, John; Freedman, Jonathan R.; Pangborn, Robert J.; Sagona, Peter J., Vessel inspection apparatus and methods.
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  61. Felts, John T.; Fisk, Thomas E.; Abrams, Robert S.; Ferguson, John; Freedman, Johathan R.; Pangborn, Robert J.; Sagona, Peter J., Vessel, coating, inspection and processing apparatus.
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  62. Felts, John T.; Fisk, Thomas E.; Abrams, Robert; Ferguson, John; Freedman, Jonathan; Pangborn, Robert; Sagona, Peter, Vessels, contact surfaces, and coating and inspection apparatus and methods.
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