초록 ▼

A data-driven electrochemical grinding apparatus and method produces series of finished-cut, burr-free tube sections of precisely defined lengths. The data-driven process automatically inputs desired tube lengths, tracks the cut tube sections during the process, and produces recorded output of tube

A data-driven electrochemical grinding apparatus and method produces series of finished-cut, burr-free tube sections of precisely defined lengths. The data-driven process automatically inputs desired tube lengths, tracks the cut tube sections during the process, and produces recorded output of tube and process parameters. Such tube sections are particularly suitable for use in ultrahigh purity gas cabinets used in semiconductor manufacturing equipment.

대표청구항 ▼

[ It is claimed:] [1.] An apparatus for producing a plurality of finished-cut, burr-free tube sections, comprisingan electrochemical abrasive cutter, said cutter comprising a cutting wheel which defines a cutting plane, a feeder for feeding tubing to the cutting wheel, and an electrolyte stream;prog

[ It is claimed:] [1.] An apparatus for producing a plurality of finished-cut, burr-free tube sections, comprisingan electrochemical abrasive cutter, said cutter comprising a cutting wheel which defines a cutting plane, a feeder for feeding tubing to the cutting wheel, and an electrolyte stream;programmable control means for controlling said feeder and cutting wheel;input means for inputting a series of desired cut lengths to said control means, whereby said feeder is effective to accurately position said tubing with respect to said cutting plane for each said cut length, to produce a corresponding series of cut tubes, each having a serial position and actual cut length;means for holding said series of cut tubes in serial order for movement to a measuring station;means within said measuring station for determining the actual cut length of each said tube; andmeans for holding said series of cut tubes in serial order for movement through a laser marking station.