초록 ▼

A device and a process for multilayer PVD ("Physical Vapor Deposition") coating of substances includes one or more sputter target systems. A sputter target system generally consists of a plurality of individual targets arranged in the cross-sectional shape of a hollow regular polygon. The arrangemen

A device and a process for multilayer PVD ("Physical Vapor Deposition") coating of substances includes one or more sputter target systems. A sputter target system generally consists of a plurality of individual targets arranged in the cross-sectional shape of a hollow regular polygon. The arrangement is rotatably mounted about the axis of symmetry of the hollow polygon. In the interior of the hollow polygon, preferably magnetrons (inner magnetrons) are present. By virtue of shielding, only one individual target of the sputter target system is exposed to the ionic bombardment at any one time. The multilayer coating is accomplished according to the invention by a coating strategy with step wise rotation, controlled according to plan, of the sputter target system in angular steps corresponding to the order of symmetry of the hollow polygon. Besides magnetron sputter, the invention is applicable also to other PVD coating processes, preferably to coating by means of electric arc, low-voltage electron beam and/or laser-supported evaporation or a combination of such processes.

대표청구항 ▼

[ What is claimed:] [1.] A device for multilayer PVD coating of a substrate comprising:a coating chamber for receiving at least one substrate to be coated;a sputter source within said coating chamber, said sputter source including a sputter target system, said sputter target system including at leas

[ What is claimed:] [1.] A device for multilayer PVD coating of a substrate comprising:a coating chamber for receiving at least one substrate to be coated;a sputter source within said coating chamber, said sputter source including a sputter target system, said sputter target system including at least two target holders, each said target holders for receiving a plurality of targets and arranging the plurality of targets as a polygonal structure having an axis of symmetry, said at least two target holders being arranged with respect to each other to just admit full rotation about their axes of symmetry;a rotational drive mechanism operatively coupled to said at least two target holders; anda controller, said controller being operatively coupled to the rotational drive mechanism and controlling the rotation of said at least two target holders.