초록 ▼

A helium supply unit (1) supplies helium from a high pressure storage (21) to fill a test chamber (6) which encloses a sample holder (5) to be examined for leaks by measuring device (2) including a mass spectrometer (3) and a control unit (4). The test gas is recovered after the testing by a pressur

A helium supply unit (1) supplies helium from a high pressure storage (21) to fill a test chamber (6) which encloses a sample holder (5) to be examined for leaks by measuring device (2) including a mass spectrometer (3) and a control unit (4). The test gas is recovered after the testing by a pressure difference between a low pressure storage (18) and the test chamber (6). The test chamber is evacuated prior to receipt of the test gas by a vacuum pump (27) and after testing by a vacuum pump (34) for more complete helium recovery. The recovered test gas is then transmitted back to the high pressure storage (21) through a compressor (19), which raises the pressure of the recovered gas to a predetermined pressure, from the low pressure storage (18). The control unit (4) also controls a pure test gas supply (37) and a release valve (44). The concentration of the recovered test gas is measured and, if the concentration is too low, the control unit (4) releases the recovered test gas through valve (44) and admits fresh test gas from the supply (37) into the helium supply unit (1) at a point between the low pressure storage (18) and the compressor (19). In this manner, expensive test gases, such as helium, are recovered and reused.

대표청구항 ▼

[ Having thus described the preferred embodiment, the invention is now claimed to be:] [1.] A method for recovering helium used to measure leaks during a work piece testing, the method comprising:supplying helium from a high pressure storage, in which helium is held at a higher pressure, to a testin

[ Having thus described the preferred embodiment, the invention is now claimed to be:] [1.] A method for recovering helium used to measure leaks during a work piece testing, the method comprising:supplying helium from a high pressure storage, in which helium is held at a higher pressure, to a testing area in which a workpiece is surrounded by an enclosure to fill one of (i) the workpiece or (ii) an area between the workpiece and the enclosure with helium;testing for helium in the other of (i) the interior of the workpiece or (ii) the area between the workpiece and the enclosure to test for leaks in the workpiece;after the testing has completed, drawing the helium to a low pressure storage where the low pressure storage is used for containing said recovered helium during a first stage of said recovery;compressing helium from the low pressure storage to at least the pressure of the high pressure storage; and,transferring the compressed helium to a high pressure storage for re-use to test for leaks during a second stage of said recovery, where said high pressure storage services as a source of recovered helium for future leak testing of any other workpieces.