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특허 상세정보

Method and apparatus for recovering helium after testing for leaks in a sample holder

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B01D-015/08    F15B-001/02    G01M-003/20    F25J-003/00   
미국특허분류(USC) 730/407 ; 730/492
출원번호 US-0231389 (1999-01-13)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Fay, Sharpe, Fagan, Minnich & McKee, LLP
인용정보 피인용 횟수 : 7  인용 특허 : 15
초록

A helium supply unit (1) supplies helium from a high pressure storage (21) to fill a test chamber (6) which encloses a sample holder (5) to be examined for leaks by measuring device (2) including a mass spectrometer (3) and a control unit (4). The test gas is recovered after the testing by a pressure difference between a low pressure storage (18) and the test chamber (6). The test chamber is evacuated prior to receipt of the test gas by a vacuum pump (27) and after testing by a vacuum pump (34) for more complete helium recovery. The recovered test gas is...

대표
청구항

[ Having thus described the preferred embodiment, the invention is now claimed to be:] [1.] A method for recovering helium used to measure leaks during a work piece testing, the method comprising:supplying helium from a high pressure storage, in which helium is held at a higher pressure, to a testing area in which a workpiece is surrounded by an enclosure to fill one of (i) the workpiece or (ii) an area between the workpiece and the enclosure with helium;testing for helium in the other of (i) the interior of the workpiece or (ii) the area between the wor...

이 특허에 인용된 특허 (15)

  1. Sommer Hermann W. (Munich DEX) Schloderer Robert (Munich DEX) Neubacher Franz P. (Stockerau ATX). Apparatus for treatment and purification of waste gases from a secondary aluminum melting plant. USP1993095248473.
  2. Jean-Luc Germain (Chatou FRX) Eric Janneteau (Rueil Malmaison FRX) Francois Loisy (Courbevoie FRX) Joel Honore (Paris FRX). Detecting leaks in a heat exchanger in operation. USP1987084688627.
  3. Asano Masaharu (Yokosuka JPX) Hosaka Akio (Yokohama JPX). Exhaust gas sensor temperature detection system. USP1979054153023.
  4. Martinez Erasmo (Torrace CA) Walmsley Steven E. (Signal Hill CA) Chang Shu-Ming (Monterey Park CA). Flow accelerator for leak detector probe. USP1995055417105.
  5. Burns William (Rochester Hills MI). Leak testing apparatus and method. USP1994125375456.
  6. Kim Dae-woo,KRX ; Lee Jae-kyung,KRX ; Koo Bon-rip,KRX ; Kim Sang-woon,KRX. Leakage gas detector for semiconductor device and leakage gas detecting method using the same. USP1998035728940.
  7. Brger Heinz D. (Wertheim DEX). Method of leak testing a test container with a tracer gas. USP1991014984450.
  8. Schulte Thomas R. (Grand Island NY) Heim Carl J. (Amherst NY) Gorjaczkowski Vladimir T. (Williamsville NY) Giglia Salvatore (Norwood MA). Pressurizing with and recovering helium. USP1995025390533.
  9. Mehra Yuv R. (The Woodlands TX). Process for recovering helium from a gas stream. USP1993075224350.
  10. Choe Jung S. (Allentown PA) Agrawal Rakesh (Allentown PA) Auvil Steven R. (Macungie PA). Process for recovering helium from a multi-component gas stream. USP1988014717407.
  11. Choe Jung S. (Allentown PA) Auvil Steven R. (Macungie PA) Agrawal Rakesh (Allentown PA). Process for separating components of a gas stream. USP1987104701187.
  12. Czarnecki Bogdan A. (Westhoughton GBX) Limb David I. (Stockport GBX). Purification of helium. USP1987064675030.
  13. Tallon Jacques (Annecy FRX). Seal tester. USP1992125172583.
  14. Mahoney David G. (Londonderry NH) Ruiz Glenn E. (Billerica MA) Farmer Jack W. (Sierra Madre CA) Pflanz Thomas L. (Westwood MA) Hall William D. (Deerfield NH) Parsons ; deceased Roy F. (late of Dunsta. Sealed parts leak testing method and apparatus for helium spectrometer leak detection. USP1997045625141.
  15. Voss Gunter,DEX ; Schoroth Anno,DEX. Search gas detector with vacuum pump and process for operating such a search gas detector. USP1998075786529.