|국가/구분||United States(US) Patent 등록|
|국제특허분류(IPC7판)||B01D-015/08 F15B-001/02 G01M-003/20 F25J-003/00|
|미국특허분류(USC)||730/407 ; 730/492|
|발명자 / 주소|
|출원인 / 주소|
|대리인 / 주소||
|인용정보||피인용 횟수 : 7 인용 특허 : 15|
A helium supply unit (1) supplies helium from a high pressure storage (21) to fill a test chamber (6) which encloses a sample holder (5) to be examined for leaks by measuring device (2) including a mass spectrometer (3) and a control unit (4). The test gas is recovered after the testing by a pressure difference between a low pressure storage (18) and the test chamber (6). The test chamber is evacuated prior to receipt of the test gas by a vacuum pump (27) and after testing by a vacuum pump (34) for more complete helium recovery. The recovered test gas is...
[ Having thus described the preferred embodiment, the invention is now claimed to be:] [1.] A method for recovering helium used to measure leaks during a work piece testing, the method comprising:supplying helium from a high pressure storage, in which helium is held at a higher pressure, to a testing area in which a workpiece is surrounded by an enclosure to fill one of (i) the workpiece or (ii) an area between the workpiece and the enclosure with helium;testing for helium in the other of (i) the interior of the workpiece or (ii) the area between the wor...