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Crystal ion-slicing of single-crystal films 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C30B-031/22
출원번호 US-0025114 (1998-02-17)
발명자 / 주소
  • Levy Miguel
  • Osgood
  • Jr. Richard M.
출원인 / 주소
  • The Trustees of Columbia University in the City of New York
대리인 / 주소
    Baker Botts LLP
인용정보 피인용 횟수 : 57  인용 특허 : 5

초록 ▼

A method is provided for detaching a single-crystal film from an epilayer/substrate or bulk crystal structure. The method includes the steps of implanting ions into the crystal structure to form a damage layer within the crystal structure at an implantation depth below a top surface of the crystal s

대표청구항 ▼

[ What is claimed is:] [1.] A method for detaching a single-crystal metal oxide film from a metal oxide crystal structure, said method comprising the steps of:implanting ions into said crystal structure to form a damage layer within said crystal structure at an implantation depth below a top surface

이 특허에 인용된 특허 (5)

  1. Goesele Ulrich M. ; Tong Q.-Y., Method for the transfer of thin layers of monocrystalline material to a desirable substrate.
    상세보기
  2. Cook Melvin S. (43 Westerly Rd. Saddle River NJ 07458), Method of peeling thin films using directional heat flow.
    상세보기
  3. Abernathey John R. (Jericho VT) Lasky Jerome B. (Essex Junction VT) Nesbit Larry A. (Williston VT) Sedgwick Thomas O. (Briarcliff Manor NY) Stiffler Scott R. (Cortland NY), Method of producing a thin silicon-on-insulator layer.
    상세보기
  4. Cook Melvin S. (43 Westerly Rd. Saddle River NJ 07458), Method of producing single-crystal semiconductor films by laser treatment.
    상세보기
  5. Bruel Michel (Veurey FRX), Process for the production of thin semiconductor material films.
    상세보기

이 특허를 인용한 특허 (57)

  1. Linares, Robert C.; Doering, Patrick J., Boron doped single crystal diamond electrochemical synthesis electrode.
    상세보기
  2. Francois J. Henley ; Michael A. Brayan ; William G. En, Cleaving process to fabricate multilayered substrates using low implantation doses.
    상세보기
  3. Henley,Francois J.; Bryan,Michael A.; En,William G., Cleaving process to fabricate multilayered substrates using low implantation doses.
    상세보기
  4. Baer, Stephen C., Cleaving wafers from silicon crystals.
    상세보기
  5. Francois J. Henley ; Nathan Cheung, Controlled cleavage process and device for patterned films.
    상세보기
  6. Henley, Francois J.; Cheung, Nathan, Controlled cleavage process and device for patterned films.
    상세보기
  7. Francois J. Henley ; Nathan W. Cheung, Controlled cleavage process and resulting device using beta annealing.
    상세보기
  8. Henley, Francois J.; Cheung, Nathan, Controlled cleavage process using pressurized fluid.
    상세보기
  9. Henley,Francois J.; Cheung,Nathan W., Controlled cleaving process.
    상세보기
  10. Henley,Francois J.; Cheung,Nathan W., Controlled cleaving process.
    상세보기
  11. Henley, Francois J.; Cheung, Nathan W., Controlled process and resulting device.
    상세보기
  12. Henley, Francois J.; Cheung, Nathan W., Controlled process and resulting device.
    상세보기
  13. Henley, Francois J.; Cheung, Nathan W., Controlled process and resulting device.
    상세보기
  14. Henley,Francois J.; Cheung,Nathan W., Controlled process and resulting device.
    상세보기
  15. Speck, James S.; Haskell, Benjamin A.; Pattison, P. Morgan; Baker, Troy J., Etching technique for the fabrication of thin (Al, In, Ga)N layers.
    상세보기
  16. Henley, Francois J.; Cheung, Nathan W., Gettering technique for wafers made using a controlled cleaving process.
    상세보기
  17. Henley, Francois J.; Cheung, Nathan W., Gettering technique for wafers made using a controlled cleaving process.
    상세보기
  18. Yong Chen ; Scott W. Corzine ; Theodore I. Kamins ; Michael J. Ludowise ; Pierre H. Mertz ; Shih-Yuan Wang, Integrated circuit substrate that accommodates lattice mismatch stress.
    상세보기
  19. Adam, John D.; Krishnaswamy, Silai V.; Piazza, Gianluca, Lateral over-moded bulk acoustic resonators.
    상세보기
  20. Henley, Francois J., Layer transfer of films utilizing controlled propagation.
    상세보기
  21. Henley, Francois J., Layer transfer of films utilizing controlled shear region.
    상세보기
  22. Tiwari, Sandip, Low temperature semiconductor layering and three-dimensional electronic circuits using the layering.
    상세보기
  23. Francois J. Henley ; Nathan W. Cheung, Method and device for controlled cleaving process.
    상세보기
  24. Henley, Francois J.; Cheung, Nathan W., Method and device for controlled cleaving process.
    상세보기
  25. Henley,Francois J.; Cheung,Nathan, Method and device for controlled cleaving process.
    상세보기
  26. Iwasaki, Atsushi; Ghyselen, Bruno, Method and device for making substrates.
    상세보기
  27. Henley, Francois J., Method and structure for fabricating solar cells using a thick layer transfer process.
    상세보기
  28. Faure,Bruce, Method for fabricating a carrier substrate.
    상세보기
  29. Radojevic, Antonije M.; Osgood, Jr., Richard M.; Levy, Miguel, Method for fabricating ultra thin single-crystal metal oxide wave retarder plates and waveguide polarization mode converter using the same.
    상세보기
  30. Kub, Francis J.; Hobart, Karl D., Method for making piezoelectric resonator and surface acoustic wave device using hydrogen implant layer splitting.
    상세보기
  31. Kub, Francis J.; Hobart, Karl D., Method for making pyroelectric, electro-optical and decoupling capacitors using thin film transfer and hydrogen ion splitting techniques.
    상세보기
  32. Artmann, Hans; Frey, Wilhelm; Moellendorf, Manfred, Method for production of a thin film and a thin-film solar cell, in particular, on a carrier substrate.
    상세보기
  33. Feng Zhou ; Seng-Tiong Ho, Method for the formation of a thin optical crystal layer overlying a low dielectric constant substrate.
    상세보기
  34. Kononchuk,Oleg; Letertre,Fabrice; Langer,Robert, Method of fabrication of highly heat dissipative substrates.
    상세보기
  35. Torvik,John Targe, Method of making a hybrid substrate having a thin silicon carbide membrane layer.
    상세보기
  36. Torvik, John Tarje, Method of making a hybride substrate having a thin silicon carbide membrane layer.
    상세보기
  37. Mizutani Masaki,JPX ; Tanikawa Isao,JPX ; Nakagawa Katsumi,JPX ; Shoji Tatsumi,JPX ; Ukiyo Noritaka,JPX ; Iwasaki Yukiko,JPX, Method of producing semiconductor thin film and method of producing solar cell using same.
    상세보기
  38. Mizutani, Masaki; Tanikawa, Isao; Nakagawa, Katsumi; Shoji, Tatsumi; Ukiyo, Noritaka; Iwasaki, Yukiko, Method of producing semiconductor thin film and method of producing solar cell using same.
    상세보기
  39. Malik, Igor J.; Kang, Sien G.; Fuerfanger, Martin; Kirk, Harry; Flat, Ariel; Current, Michael Ira; Ong, Philip James, Non-contact etch annealing of strained layers.
    상세보기
  40. Bryan, Michael A.; Kai, James K., Nozzle for cleaving substrates.
    상세보기
  41. Sriram, Sriram S.; Kingsley, Stuart A., Optical modulator.
    상세보기
  42. Bryan, Michael A., Particle distribution method and resulting structure for a layer transfer process.
    상세보기
  43. Moriceau, Hubert; Couchaud, Maurice; Deschanvres, Jean-Luc; Joudrier, Anne-Laure, Process for transferring films.
    상세보기
  44. Henley, Francois J.; Brailove, Adam, Race track configuration and method for wafering silicon solar substrates.
    상세보기
  45. Losavio Aldo,ITX, Recovery of damages in a field oxide caused by high energy ion implant process.
    상세보기
  46. Takizawa, Ritsuo, SOI substrate and method for producing the same, solid-state image pickup device and method for producing the same, and image pickup apparatus.
    상세보기
  47. Muraoka,Kouichi; Kurihara,Kazuaki, Semiconductor device and method of manufacturing the same.
    상세보기
  48. Henley, Francois J.; Cheung, Nathan W., Silicon-on-silicon hybrid wafer assembly.
    상세보기
  49. Levy, Miguel; Osgood, Jr., Richard M.; Radojevic, Antonije M., Slicing of single-crystal films using ion implantation.
    상세보기
  50. Loncar, Marko; Lukin, Mikhail D.; Burek, Michael J.; de Leon, Nathalie; Shields, Brendan, Small-scale fabrication systems and methods.
    상세보기
  51. Henley, Francois; Lamm, Al; Chow, Yi-Lei, Substrate cleaving under controlled stress conditions.
    상세보기
  52. Henley, Francois; Lamm, Al; Chow, Yi-Lei, Substrate cleaving under controlled stress conditions.
    상세보기
  53. Henley, Francois; Lamm, Al; Chow, Yi-Lei, Substrate cleaving under controlled stress conditions.
    상세보기
  54. Linares,Robert C.; Doering,Patrick J., System and method for producing synthetic diamond.
    상세보기
  55. Brailove, Adam; Liu, Zuqin; Henley, Francois J.; Lamm, Albert J., Techniques for forming thin films by implantation with reduced channeling.
    상세보기
  56. Glebov,Alexei; Lee,Michael G., Thin film electro-optical deflector device and a method of fabrication of such a device.
    상세보기
  57. Gill, Douglas M.; Jacobson, Dale Conrad, Thin film lithium niobate structure and method of making the same.
    상세보기

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