|국가/구분||United States(US) Patent 등록|
|미국특허분류(USC)||11/7084 ; 11/708.6 ; 11/720.2 ; 11/872.6 ; 13/738.6 ; 14/108.3 ; 14/119.8 ; 22/205.8 ; 26/112.6|
|발명자 / 주소|
|출원인 / 주소|
|대리인 / 주소||
|인용정보||피인용 횟수 : 7 인용 특허 : 8|
A delivery system and method for providing a gaseous chemical is provided. The system comprises a single bubbler 12 having a chamber 13 for containing a liquid chemical, at least one inlet tube 14 for providing a carrier gas to said chamber, and one outlet tube 16 for providing the gaseous chemical. A liquid chemical supply line 25 conveys the liquid chemical to said chamber. A bubbler is in contact with weight measuring device 24 for weighing the bubbler and generating an output signal responsive to the measured weight. A liquid chemical controller 20 i...
[ What is claimed:] [1.] A delivery system for providing a gaseous chemical in semiconductor industry applications by bubbling a carrier gas through a liquid chemical, comprising:a single bubbler having a chamber for containing the liquid chemical, at least one inlet tube for providing a carrier gas to said chamber, and one outlet tube for providing the gaseous chemical;a liquid chemical supply line for conveying the liquid chemical to said chamber;a weight measuring device for weighing the bubbler and generating an output signal responsive to the measur...