초록 ▼

A method of manufacturing an active matrix substrate is provided that uses a technique of transferring a thin film device. In forming thin film transistors and pixel electrodes on an original substrate before transfer, an insulator film such as an interlayer insulation film or the like, is previousl

A method of manufacturing an active matrix substrate is provided that uses a technique of transferring a thin film device. In forming thin film transistors and pixel electrodes on an original substrate before transfer, an insulator film such as an interlayer insulation film or the like, is previously removed before the pixel electrodes are formed. Further, the original substrate is separated by exfoliation to transfer the device to a transfer material to cause the pixel electrodes to partially appear in the surface or the vicinity of the surface of the device. This portion permits application of a voltage to a liquid crystal through the pixel electrode.

대표청구항 ▼

[ What is claimed is:] [1.] A method of manufacturing an active matrix substrate comprising a pixel portion including thin film transistors connected to scanning lines and signal lines arranged in a matrix, and pixel electrodes connected to terminals of the thin film transistors, the method comprisi

[ What is claimed is:] [1.] A method of manufacturing an active matrix substrate comprising a pixel portion including thin film transistors connected to scanning lines and signal lines arranged in a matrix, and pixel electrodes connected to terminals of the thin film transistors, the method comprising the steps of:forming a separation layer on a substrate;forming the thin film transistors over the separation layer;forming an insulation film on the thin film transistors and over the separation layer;selectively removing at least a portion of the insulation film where each of the pixel electrodes is to be formed;forming each of the pixel electrodes on the insulation film and the separation layer in the region where at least a portion of the insulation film has been removed;adhering the thin film transistors to a transfer material with an adhesive layer;producing exfoliation in the separation layer and/or at an interface of the separation layer and the substrate to separate the substrate from the separation layer; andremoving any portion of the separation layer remaining on the pixel electrodes to form an active matrix substrate using the transfer material as a new substrate.