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Cold-cathode ion source with propagation of ions in the electron drift plane 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01J-027/02
출원번호 US-0161581 (1998-09-28)
발명자 / 주소
  • Maishev Yuri,RUX
  • Ritter James
  • Terentiev Yuri,RUX
  • Velikov Leonid
출원인 / 주소
  • Advanced Ion Technology, Inc
대리인 / 주소
    Zborovsky
인용정보 피인용 횟수 : 36  인용 특허 : 3

초록

The ion source of the invention emits ion beams radially inwardly or radially outwardly from the entire periphery of the closed-loop ion-emitting slit. In one embodiment, a tubular or oval-shaped hollow body, which also functions as a cathode, contains a similarly-shaped concentric anode spaced from

대표청구항

[ What is claimed is:] [1.] An ion source with propagation of ions in the electron drift plane for emitting ion beams in a radial direction toward an object located in a position reachable by said ion beams, comprising:hollow housing that functions as a cathode of said ion beam source, said hollow h

이 특허에 인용된 특허 (3)

  1. Singh Bawa (Cherry Hill NJ) Denton Peter R. (Cherry Hill NJ), Cold cathode ion beam source.
  2. Kovalsky ; Georgy Alexandrovich ; Maishev ; Jury Petrovich ; Dmitriev ; Jury Akimovich, Ion source.
  3. Maishev Yuri,RUX ; Ritter James ; Velikov Leonid, Universal cold-cathode type ion source with closed-loop electron drifting and adjustable ion-emitting slit.

이 특허를 인용한 특허 (36)

  1. Hailey, Kim L.; Conn, Robert O., Accelerator on a chip having a cold ion source.
  2. Jenson, Mark L.; Klaassen, Jody J.; Sullivan, Jim, Active wireless tagging system on peel and stick substrate.
  3. Shakespeare,Stuart, Apparatus and method for depositing material onto a substrate using a roll-to-roll mask.
  4. Jacobs, Harlan T.; Jenson, Mark L.; Klaassen, Jody J.; Yan, Jenn-Feng, Battery-operated wireless-communication apparatus and method.
  5. Jacobs, Harlan T.; Jenson, Mark L.; Klassen, Jody J.; Yan, Jenn-Feng, Battery-operated wireless-communication apparatus and method.
  6. Jacobs,Harlan Theodore; Jenson,Mark Lynn; Klaassen,Jody Jon; Yan,Jenn Feng, Battery-operated wireless-communication apparatus and method.
  7. Waddell, Charles Houston; Christiansen, Joseph Anton, Bipolar ionization device.
  8. Jenson,Mark Lynn, Continuous processing of thin-film batteries and like devices.
  9. Jenson,Mark Lynn; Klaassen,Jody Jon; Weiss,Victor Henry; Yan,Jenn Feng, Device enclosures and devices with integrated battery.
  10. Jacobs, Harlan T.; Jenson, Mark L.; Klaassen, Jody J.; Yan, Jenn-Feng, Encapsulated integrated-circuit device with thin-film battery.
  11. Gutkin, Michael; Bizyukov, Alexander; Sleptsov, Vladimir; Bizyukov, Ivan; Sereda, Konstantin, Focused anode layer ion source with converging and charge compensated beam (falcon).
  12. Alekseev, Valery V.; Zelenkov, Vsevolod V.; Krivoruchko, Mark M.; Keem, John E., Ion sources.
  13. Maishev Yuri,RUX ; Ritter James ; Velikov Leonid ; Shkolnik Alexander, Ion-beam source with uniform distribution of ion-current density on the surface of an object being treated.
  14. Whaley, David Riley, Ion-shielded focusing method for high-density electron beams generated by planar cold cathode electron emitters.
  15. Tarnowski,Dave J.; Jenson,Mark L., Layered barrier structure having one or more definable layers and method.
  16. Klaassen,Jody J., Lithium/air batteries with LiPON as separator and protective barrier and method.
  17. Klaassen,Jody J., Lithium/air batteries with LiPON as separator and protective barrier and method.
  18. Siegfried,Daniel E.; Burtner,David Matthew; Townsend,Scott A.; Keem,John; Alexeyev,Valery; Zelenkov,Vsevolod; Krivoruchko,Mark, Longitudinal cathode expansion in an ion source.
  19. Jenson, Mark L., Low-temperature fabrication of thin-film energy-storage devices.
  20. Jenson, Mark L.; Klaassen, Jody J., Method and apparatus for integrated-circuit battery devices.
  21. Jenson, Mark L.; Klaassen, Jody J., Method and apparatus for integrated-circuit battery devices.
  22. Jenson,Mark L.; Weiss,Victor H., Method and apparatus for thin-film battery having ultra-thin electrolyte.
  23. Jenson, Mark Lynn, Method of continuous processing of thin-film batteries and like devices.
  24. Siegfried,Daniel E.; Burtner,David Matthew; Townsend,Scott A.; Alexeyev,Valery, Modular ion source.
  25. Siegfried, Daniel E.; Burtner, David Matthew; Townsend, Scott A.; Keem, John; Krivoruchko, Mark; Alexeyev, Valery; Zelenkov, Vsevolod, Modular uniform gas distribution system in an ion source.
  26. Schmidt-Boecking, Horst; Spielberger, Lutz; Braeuning-Demian, Angela; Penache, Maria Cristina; Schoessler, Sven; Jahnke, Till; Hohn, Oliver; Mergel, Volker, Particle source for producing excited particles.
  27. Read, John B.; Sweeney, Daniel C., Rugged, gel-free, lithium-free, high energy density solid-state electrochemical energy storage devices.
  28. Sweeney, Daniel C.; Read, John B., Rugged, gel-free, lithium-free, high energy density solid-state electrochemical energy storage devices.
  29. Jenson,Mark L.; Klaassen,Jody J.; Sullivan,Jim; Lemaire,Charles A.; Billion,Richard E., Solid state MEMS activity-activated battery device and method.
  30. Jenson, Mark L.; Klaassen, Jody J.; Sullivan, Jim; Lemaire, Charles A.; Billion, Richard E., Solid state activity-activated battery device and method.
  31. Burtner, David Matthew; Siegfried, Daniel E.; Blacker, Richard; Alexeyev, Valery; Keem, John; Zelenkov, Vsevolod; Krivoruchko, Mark, Sputtered contamination shielding for an ion source.
  32. Klaassen, Jody J., Thin-film batteries with polymer and LiPON electrolyte layers and method.
  33. Jenson,Mark L., Thin-film battery devices and apparatus for making the same.
  34. Jenson,Mark Lynn; Weiss,Victor Henry, Thin-film battery having ultra-thin electrolyte.
  35. Jenson,Mark Lynn; Weiss,Victor Henry, Thin-film battery having ultra-thin electrolyte and associated method.
  36. Imamura,Tomonori; Yamada,Isao; Toyoda,Noriaki, Ultra precise polishing method and ultra precise polishing apparatus.
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