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Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B01D-053/22
  • B01D-053/04
출원번호 US-0082596 (1998-05-21)
발명자 / 주소
  • Hultquist Steven J.
  • Tom Glenn M.
  • Kirlin Peter S.
  • McManus James V.
출원인 / 주소
  • Advanced Technology Materials, Inc.
대리인 / 주소
    Hultquist
인용정보 피인용 횟수 : 73  인용 특허 : 28

초록 ▼

A sorbent-based gas storage and dispensing system, including a storage and dispensing vessel containing a solid-phase physical sorbent medium having a sorbate gas physically adsorbed thereon. A chemisorbent material is provided in the vessel to chemisorb the impurities for gas phase removal thereof

대표청구항 ▼

[ What is claimed is:] [1.] A process for supplying a reagent gas, comprising:providing a storage and dispensing vessel containing a solid-phase physical sorbent medium having the reagent gas physically adsorbed thereon;chemisorbing gas phase impurities of the reagent gas in the storage and dispensi

이 특허에 인용된 특허 (28)

  1. Eckardt Bernd (Bruchkoebel DEX) Burbach Thomas (Dietzenbach DEX), Adsorption device for gas separation.
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  2. Jain Ravi (Piscataway NJ), Apparatus for low temperature purification of gases.
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  3. Zheng Dao-Hong (London GBX) Irven John (High Wycombe GBX) Paterson Alan J. F. (Crewe GBX) Tregear Daniel C. (Cambridge GBX), Apparatus for supplying high purity fluid.
    상세보기
  4. Dockery Denzel J. (G-4142 Fenton Road Flint MI), Breathing apparatus for underwater use.
    상세보기
  5. Tom Glenn M. (New Milford CT), Bulk gas sorption and apparatus, gas containment/treatment system comprising same, and sorbent composition therefor.
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  6. Diot Christian (11 ; rue du Noisetier -Clos Notre Dame 77340 Pontault-Combault FRX) Larrieu Dominique (48 ; rue de la Sourderie 78180 Montigny-le-Brettoneux FRX) Rivero Alain (4 ; rue Henri de Bourna, Enclosure and apparatus for separating gas mixtures by adsorption.
    상세보기
  7. Sassa Robert L. (Newark DE) Bailey Christian E. (Newark DE), Expanded polytetrafluoroethylene tubular container.
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  8. Tom Glenn M. ; McManus James V. ; Olander W. Karl, Fluid storage and delivery system comprising high work capacity physical sorbent.
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  9. Tom Glenn M. ; McManus James V. ; Olander W. Karl, Fluid storage and delivery system utilizing carbon sorbent medium.
    상세보기
  10. Tom Glenn M., High capacity gas storage and dispensing system.
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  11. Nowobilski Jeffert J. (Orchard Park NY) Notaro Frank (Amherst NY) Acharya Arun (East Amherst NY), Method and apparatus for quick filling gas cylinders.
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  12. Briesacher Jeffrey L. (Pismo Beach CA) Applegarth Charles H. (San Luis Obispo CA) Lorimer D\Arcy H. (Pismo Beach CA), Method and apparatus for removing residual hydrogen from a purified gas.
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  13. De Bievre Paul J. (Kasterlee BEX) Vansant Etienne F. (Zoersel BEX) Peeters Guido J. (Berchem BEX), Method of encapsulating materials in a zeolite in a stable manner.
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  14. McCombs Norman R. (Tonawanda NY) Vrana Edward E. (West Seneca NY), Pressure swing adsorption process and system for gas separation.
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  15. Tom Glenn M. (New Milford CT) Brown Duncan W. (Wilton CT), Process and composition for purifying arsine, phosphine, ammonia, and inert gases to remove Lewis acid and oxidant impur.
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  16. Tom Glenn M. (New Milford CT) McManus James V. (Danbury CT), Process and composition for purifying semiconductor process gases to remove Lewis acid and oxidant impurities therefrom.
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  17. Godino Claude (Biviers FRX) Duval Philippe (Echirolles FRX) Ghnassia-Daudin Benot (Voreppe FRX), Process and plant for purification by adsorption on activated carbon and corresponding adsorber vessel.
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  18. Parent Jean-Claude (Garches FRX) Renaudin Marie-Hlne (Paris FRX), Process for preparing disilane by using molecular sieves.
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  19. Nishino Hiroshi (Suita JPX) Aibe Toshio (Kashima JPX), Process for removal of poisonous gases.
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  20. Prigge Helene (Unterschleissheim DEX) Rurlnder Robert (Halsbach DEX) Hoffman Harald (Burghausen DEX) Bortner Hans-Peter (Emmerting DEX), Process for removing gaseous contaminating compounds from carrier gases containing halosilane compounds.
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  21. Tom Glenn M. ; McManus James V., Process system with integrated gas storage and delivery unit.
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  22. Tamhankar Satish S. (Scotch Plains NJ) Ramachandran Ramakrishnan (Allendale NJ) Blow Martin (Basking Ridge NJ) Galica Theodore R. (Glen Gardner NJ), Removal of perfluorocarbons from gas streams.
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  23. Simons Harold M. (Orem UT), Self-regenerating system of removing oxygen and water impurities from hydrogen gas.
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  24. Tom Glenn M. (New Milford CT) McManus James V. (Danbury CT), Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds.
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  25. Tom Glenn M. (New Milford CT), Valve block and container for semiconductor source reagent dispensing and/or purification.
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  26. Tom Glenn M. (New Milford CT), Valve block and container for semiconductor source reagent dispensing and/or purification.
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  27. Collin Nathalie,FRX ; Quemin Eric,FRX, Water-in-oil emulsion containing retinol, its use and its packaging.
    상세보기
  28. Knollmueller Karl O. (Hamden CT), Zeolite based arsine storage and delivery system.
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  2. Holst, Mark; Dubois, Ray; Arno, Jose; Faller, Rebecca; Tom, Glenn, Abatement of effluents from chemical vapor deposition processes using organometallic source reagents.
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  3. Hertzler, Benjamin Lee, Adsorbent based gas delivery system with integrated purifier.
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  4. Carruthers, J. Donald; Arno, Jose I., Apparatus and method for hydrogen generation from gaseous hydride.
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  5. Arno, Jose; Sturm, Edward; Wang, Luping; Dietz, James, Apparatus and method for inhibiting decomposition of germane.
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  6. Olander, W. Karl; Arno, Jose I.; Kaim, Robert, Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation.
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  7. Sinha, Ashwini K; Smith, Stanley M; Heiderman, Douglas C; Campeau, Serge M, Boron-containing dopant compositions, systems and methods of use thereof for improving ion beam current and performance during boron ion implantation.
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  8. Pelletier Dominic Gerard ; Krauskopf Nis ; Gregory Scott James, Brazed honeycomb collimator.
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  9. Wilson, Shaun M.; Sturm, Edward A.; Wodjenski, Michael J.; Carruthers, J. Donald; Sweeney, Joshua B., Carbon adsorbent for hydrogen sulfide removal from gases containing same, and regeneration of adsorbent.
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  10. Carruthers, J. Donald; Boggs, Karl; Wang, Luping; Wilson, Shaun M.; Arno, Jose I.; Marganski, Paul J.; Bilodeau, Steven M.; Zou, Peng; Bobita, Brian; Sweeney, Joseph D.; Edwards, Douglas, Component for solar adsorption refrigeration system and method of making such component.
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  11. Carruthers, J. Donald; Boggs, Karl; Wang, Luping; Wilson, Shaun; Arno, Jose I.; Marganski, Paul J.; Bilodeau, Steven M.; Zou, Peng; Bobita, Brian; Sweeney, Joseph D.; Edwards, Douglas, Component for solar adsorption refrigeration system and method of making such component.
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  15. Dittmer, Lothar; Moschütz, Harald; Nawrot, Thomas; Ziemann, Andreas, Device for determining the conductance of laundry, dryers and method for preventing deposits on electrodes.
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  16. Dietz, James; Bishop, Steven E.; McManus, James V.; Lurcott, Steven M.; Wodjenski, Michael J.; Kaim, Robert; DiMeo, Jr., Frank, Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel.
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  17. Dietz, James; Bishop, Steven E.; McManus, James V.; Lurcott, Steven M.; Wodjenski, Michael J.; Kaim, Robert; Dimeo, Jr., Frank, Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel.
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  18. Dietz, James; Bishop, Steven E.; McManus, James V.; Lurcott, Steven M.; Wodjenski, Michael J.; Kaim, Robert; Dimeo, Jr., Frank, Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel.
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  19. McManus, James V.; Dietz, James; Lurcott, Steven M., Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel.
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  20. Olander, W. Karl; McManus, James V.; Hultquist, Steven J.; Arno, Jose I.; Van Buskirk, Peter C., Fluid storage and dispensing systems, and fluid supply processes comprising same.
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  21. Glenn M. Tom ; James V. McManus, Gas cabinet assembly comprising sorbent-based gas storage and delivery system.
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  22. Tom, Glenn M.; McManus, James V., Gas cabinet assembly comprising sorbent-based gas storage and delivery system.
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  23. Carruthers, J. Donald, Gas storage and dispensing system with monolithic carbon adsorbent.
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  24. Carruthers, J. Donald, Gas storage and dispensing system with monolithic carbon adsorbent.
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  25. Carruthers, J. Donald, Gas storage and dispensing system with monolithic carbon adsorbent.
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  26. Carruthers, J. Donald, Gas storage and dispensing system with monolithic carbon adsorbent.
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  27. Carruthers,J. Donald, Gas storage and dispensing system with monolithic carbon adsorbent.
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  28. Carruthers,J. Donald, Gas storage and dispensing system with monolithic carbon adsorbent.
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  32. Kaim, Robert; Sweeney, Joseph D.; Byl, Oleg; Yedave, Sharad N.; Jones, Edward E.; Zou, Peng; Tang, Ying; Chambers, Barry Lewis; Ray, Richard S., Isotopically-enriched boron-containing compounds, and methods of making and using same.
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  33. Kaim, Robert; Sweeney, Joseph D.; Byl, Oleg; Yedave, Sharad N.; Jones, Edward E.; Zou, Peng; Tang, Ying; Chambers, Barry Lewis; Ray, Richard S., Isotopically-enriched boron-containing compounds, and methods of making and using same.
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  40. Mark Holst ; Ray Dubois ; Jose Arno ; Rebecca Faller ; Glenn Tom, Method of abating of effluents from chemical vapor deposition processes using organometallic source reagents.
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  44. Wilson, Shaun M.; Sturm, Edward A., PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same.
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  47. Olander, W. Karl; Donatucci, Matthew B.; Wang, Luping; Wodjenski, Michael J., Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases.
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  50. Olander,W. Karl; Donatucci,Matthew B; Wang,Luping; Wodjenski,Michael J., Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases.
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