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Microelectromechanical rotary structures

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H02N-010/00
  • F01B-029/10
출원번호 US-0275058 (1999-03-23)
발명자 / 주소
  • Hill Edward A.
출원인 / 주소
  • Cronos Integrated Microsystems, Inc.
대리인 / 주소
    Myers Bigel Sibley & Sajovec
인용정보 피인용 횟수 : 62  인용 특허 : 29

초록

MEMS (Microelectromechanical System) structures are provided that are designed to rotate in response to thermal actuation or the like. In one embodiment, the MEMS rotary structure includes a hub having one or more radial spoke members that impose a rotational force upon the hub in response to applie

대표청구항

[ That which is claimed:] [1.] A microelectromechanical rotary structure comprising:a microelectronic substrate;a hub disposed upon a surface of said microelectronic substrate, said hub defining a central axis extending therethrough; andat least two hub spoke members extending outwardly from said hu

이 특허에 인용된 특허 (29)

  1. Carr William N. ; Sun Xi-qing, Cantilevered microstructure.
  2. Zhang Z. Lisa (Ithaca NY) MacDonald Noel C. (Ithaca NY), Compound stage MEM actuator suspended for multidimensional motion.
  3. Kaufmann James (19845 State Rte. P Newburg MO 65550) Moss Mary G. (12901 County Rd. 3000 Rolla MO 65401) Giedd Ryan E. (1724 W. Highland St. Springfield MO 65807) Brewer Terry L. (17971 County Rd. 84, Conducting-polymer bolometer.
  4. Cronin John E. (Milton VT) Previti-Kelly Rosemary A. (Richmond VT) Ryan James G. (Sandy Hook CT) Sullivan Timothy D. (Underhill VT), Cooling microfan arrangements and process.
  5. Adams Lowell J. (Dayton OH), Deicer assembly utilizing shaped memory metals.
  6. Takeda Hideaki (Misato JPX), Double safety thermostat having movable contacts disposed in both ends of a resilient plate.
  7. Paratte Lionel (Neuchatel CHX), Electrostatic micromotor.
  8. Culp Gordon W. (Van Nuys CA), Entropic electrothermal actuator with walking feet.
  9. Haake John M. (St. Charles MO), Fiber optic connector having at least one microactuator for precisely aligning an optical fiber and an associated fabric.
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  11. Honma Dai (Tokyo JPX), Linear motion actuator utilizing extended shape memory alloy member.
  12. Petersen Kurt (San Jose CA) Pourahmadi Farzad (Fremont CA) Craddock Russell (Birmingham GB2), Method and apparatus for thermally actuated self testing of silicon structures.
  13. Haake John M. (St. Charles MO), Microactuator for precisely aligning an optical fiber and an associated fabrication method.
  14. Haake John Martin, Microactuator for precisely positioning an optical fiber and an associated method.
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  18. Saif Muhammad T. A. ; Huang Trent ; MacDonald Noel C., Micromotion amplifier.
  19. Marcus Robert B. (133 Colchester Rd. Murray Hill NJ 07974) Carr William N. (W. Milford NJ), Microprobe.
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  21. Shimada Toshio (Tochigi JPX) Kobayashi Morio (Oyama JPX) Tada Takemi (Tochigi JPX) Kawaminami Shigeya (Tochigi JPX), Overload protective device.
  22. Paratte Lionel (Neuchtel CHX) Bornand Etienne (Boudry CHX) Racine Georges-Andr (La Chaux-de-Fonds CHX), Radial field electrostatic micromotor produced using a photolithographic micromanufacturing technique and a process for.
  23. Sakamoto Junshin,JPX ; Kugai Kenichi,JPX, Rotary polygon mirror motor.
  24. Dewispelaere Andre,BEX, Shed forming device for a textile machine with actuator means.
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  1. Lutz, Markus; Partridge, Aaron; Kronmueller, Silvia, Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same.
  2. Lutz,Markus; Partridge,Aaron; Kronmueller,Silvia, Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same.
  3. Evans John, Apparatus and method for regulating fluid flow with a micro-electro mechanical block.
  4. Luharuka, Rajesh; Hesketh, Peter J., Compliant rotary mechanism and method.
  5. Paratte,Lionel; Zanetta,Andr��; Meister,Pierre Andr��; Petremand,Yves; Golay,Nicolas; Blondeau,Fabien; Noell,Wilfried, Drive module comprising an MEMS micromotor, process for the production of this module and timepiece fitted with this module.
  6. Maarten de Boer ; Fernando Bitsie ; Brian D. Jensen, Electrostatic apparatus for measurement of microfracture strength.
  7. MacGregor,Roderick; Szilagyi,Andrei; Von Behrens,Peter Emery, Flow control assemblies having integrally formed shape memory alloy actuators.
  8. MacGregor,Roderick; Szilagyi,Andrei; Von Behrens,Peter Emery, Flow control assemblies having integrally formed shape memory alloy actuators.
  9. Ernst H Dummermuth ; Patrick C Herbert ; Steven M. Galecki, Highly sensitive capacitance comparison circuit.
  10. Boutaghou, Zine-Eddine, Integral forming technology for disc drive bearing.
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  12. Chen, Zhizhang; Pate, Michael A.; Liao, Hung, MEMS-actuated color light modulator and methods.
  13. Chen, Zhizhang; Pate, Michael A.; Liao, Hung, MEMS-actuated color light modulator and methods.
  14. Dummermuth, Ernst H.; Knieser, Michael J.; Herbert, Patrick C.; Annis, Jeffrey R.; Galecki, Steven M.; Harris, Richard D.; Lucak, Mark A.; Kretschmann, Robert J., MEMS-based electrically isolated analog-to-digital converter.
  15. Receveur,Rogier; Marxer,Cornel, MEMs switching circuit and method for an implantable medical device.
  16. Kretschmann, Robert J.; Harris, Richard D., Magnetic field sensor using microelectromechanical system.
  17. Kretschmann, Robert J.; Lucak, Mark A.; Harris, Richard D.; Knieser, Michael J., Method for constructing an isolate microelectromechanical system (MEMS) device using surface fabrication techniques.
  18. Hong, Kwon, Method for fabricating a capacitor of a semiconductor device.
  19. Harris, Richard D.; Kretschmann, Robert J., Method for fabricating a microelectromechanical system (MEMS) device using a pre-patterned bridge.
  20. Harris, Richard D.; Kretschmann, Robert J., Method for fabricating a microelectromechanical system (MEMS) device using a pre-patterned bridge.
  21. Harris, Richard D.; Knieser, Michael J.; Kretschmann, Robert J.; Lucak, Mark A., Method for fabricating an isolated microelectromechanical system (MEMS) device incorporating a wafer level cap.
  22. Harris, Richard D.; Kretschmann, Robert J.; Knieser, Michael J.; Lucak, Mark A., Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void.
  23. Harris,Richard D.; Kretschmann,Robert J.; Knieser,Michael J.; Lucak,Mark A., Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void.
  24. Harris,Richard D.; Kretschmann,Robert J.; Knieser,Michael J.; Lucak,Mark A., Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void.
  25. Knieser, Michael J.; Kretschmann, Robert J.; Lucak, Mark A.; Harris, Richard D., Method for fabricating an isolated microelectromechanical system device.
  26. Heo, Seok; Kim, Yoon Young, Method of designing rotary thermal actuator and rotary thermal actuator.
  27. Lucak, Mark A.; Harris, Richard D.; Knieser, Michael J.; Kretschmann, Robert J., Method of fabricating a microelectromechanical system (MEMS) device using a pre-patterned substrate.
  28. Picciotto,Carl E.; Hartwell,Peter George, Methods and systems for aligning and coupling devices.
  29. Dummermuth, Ernst H.; Harris, Richard D.; Knieser, Michael J., Microelectricalmechanical system (MEMS) electrical isolator with reduced sensitivity to inertial noise.
  30. Dhuler Vijayakumar R., Microelectromechanical device having single crystalline components and metallic components.
  31. Dhuler, Vijayakumar R., Microelectromechanical device having single crystalline components and metallic components.
  32. Barnes Stephen M. ; Miller Samuel L. ; Jensen Brian D. ; Rodgers M. Steven ; Burg Michael S., Microelectromechanical ratcheting apparatus.
  33. Harris, Richard D.; Knieser, Michael J.; Dummermuth, Ernst H.; Kretschmann, Robert J., Microelectromechanical system (MEMS) analog electrical isolator.
  34. Knieser, Michael J.; Harris, Richard D.; Kretschmann, Robert J.; Dummermuth, Ernst H.; Herbert, Patrick C., Microelectromechanical system (MEMS) digital electrical isolator.
  35. Herbert, Patrick C.; Annis, Jeffrey R.; Yao, Jun J.; Morris, Winfred L.; Larsson, Henric; Harris, Richard D.; Kretschmann, Robert J., Microelectromechanical system (MEMS) with improved beam suspension.
  36. Messner, William C.; Bain, James A.; Fedder, Gary K., Micromachined electrothermal rotary actuator.
  37. Jerman, John H.; Grade, John D., Micromechanical device.
  38. Receveur, Rogier; Habets, Philippe; Danzl, Ralph B.; Houben, Richard P. M.; Mattes, Michael F., Multi-stable micro electromechanical switches and methods of fabricating same.
  39. Receveur, Rogier; Habets, Philippe; Danzl, Ralph B.; Houben, Richard P. M.; Mattes, Michael F., Multi-stable micro electromechanical switches and methods of fabricating same.
  40. Receveur,Rogier; Habets,Philippe; Danzl,Ralph B.; Houben,Richard P. M.; Mattes,Michael F., Multi-stable micro electromechanical switches and methods of fabricating same.
  41. Harris, Richard D.; Kretschmann, Robert J., On-board microelectromechanical system (MEMS) sensing device for power semiconductors.
  42. Hagelin Paul Merritt ; Fling John J., Optical mirror system with multi-axis rotational control.
  43. Hagelin, Paul Merritt; Fling, John J., Optical mirror system with multi-axis rotational control.
  44. Paul Merritt Hagelin ; John J. Fling, Optical mirror system with multi-axis rotational control.
  45. Zhou, Guangya; Vj, Logeeswaran; Chau, Fook Siong, Optical scanning using vibratory diffraction gratings.
  46. Yao, Jun J.; Anderson, Robert J., Process for manufacture of micro electromechanical devices having high electrical isolation.
  47. Michalewicz, Marek; Rymuza, Zygmunt, Quantum tunnelling transducer device.
  48. Robert L. Wood ; Vivek Agrawal, Switches and switching arrays that use microelectromechanical devices having one or more beam members that are responsive to temperature.
  49. Mercanzini, Andre L., System and method for handling microcomponent parts for performing assembly of micro-devices.
  50. Mercanzini, Andre L., System and method for positional movement of microcomponents.
  51. Picciotto, Carl E.; Hartwell, Peter George, System for coupling wire to semiconductor region.
  52. Ghorbal, Ali; Surendran, Sandheep K.; Szilagyi, Andrei; von Behrens, Peter Emery; Maeder, Jean-Pierre, System, method and apparatus for reducing frictional forces and for compensating shape memory alloy-actuated valves and valve systems at high temperatures.
  53. Picciotto,Carl E.; Hartwell,Peter George, Systems and methods for electrically coupling wires and conductors.
  54. Picciotto,Carl E.; Hartwell,Peter George, Systems and methods for rectifying and detecting signals.
  55. Lutz,Markus; Partridge,Aaron, Temperature controlled MEMS resonator and method for controlling resonator frequency.
  56. Lutz,Markus; Partridge,Aaron, Temperature controlled MEMS resonator and method for controlling resonator frequency.
  57. Lutz,Markus; Partridge,Aaron, Temperature controlled MEMS resonator and method for controlling resonator frequency.
  58. Kubby,Joel A.; Ma,Jun; German,Kristine A.; Gulvin,Peter M.; Lin,Pinyen, Thermal actuator and an optical waveguide switch including the same.
  59. Ma,Jun; Kubby,Joel A.; German,Kristine A.; Gulvin,Peter M.; Lin,Pinyen, Thermal actuator and an optical waveguide switch including the same.
  60. Ma,Jun; Kubby,Joel A.; German,Kristine A.; Gulvin,Peter M.; Lin,Pinyen, Thermal actuator with offset beam segment neutral axes and an optical waveguide switch including the same.
  61. Bromley, Susan; Vollmers, Karl; Nelson, Bradley J.; Mothilal, Kamal; Roberts, Kevin, Thermally activated latch.
  62. Sinclair Michael J., Thermally activated microelectromechanical systems actuator.
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