$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Semiconductor devices with means to reduce contamination 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-023/48
  • H01L-023/52
  • H01L-029/40
출원번호 US-0030560 (1998-02-25)
우선권정보 JP0044481 (1997-02-27)
발명자 / 주소
  • Misawa Kaori,JPX
  • Ishihara Hiroyasu,JPX
  • Mizuhara Hideki,JPX
출원인 / 주소
  • Sanyo Electric Co., Ltd., JPX
대리인 / 주소
    Sheridan Ross P.C.
인용정보 피인용 횟수 : 54  인용 특허 : 0

초록

An enclosure is formed on a substrate of a semiconductor device surrounding a bonding pad, such that a groove is formed between the enclosure and the bonding pad. An insulating film is formed over the substrate, including the enclosure and the groove. The groove and the film prevent moisture and con

대표청구항

[ What is claimed is:] [1.] A semiconductor device, comprising:a substrate;a bonding pad provided over the substrate;an enclosure provided over the substrate and surrounding the bonding pad, wherein a groove is formed between the bonding pad and the enclosure; anda flattening insulating film formed

이 특허를 인용한 특허 (54)

  1. Weimer, Ronald A.; Gonzalez, Fernando, Ammonia gas passivation on nitride encapsulated devices.
  2. Hopper, Peter J.; Johnson, Peter; Hwang, Kyuwoon; Mian, Michael; Drury, Robert, Conductive trace with reduced RF impedance resulting from the skin effect.
  3. Knuepfer, Bernhard, Die and chip.
  4. Ohsaka, Shigeo; Domoto, Shinichi; Okada, Nobumasa, Electrode structure, process for fabricating electrode structure and semiconductor light-emitting device.
  5. Weimer, Ronald A.; Gonzalez, Fernando, Gas passivation on nitride encapsulated devices.
  6. Kloen Hendrik K.,NLX ; Huiskamp Lodewijk P.,NLX, Integrated circuit device.
  7. Weimer, Ronald A., Integrated circuit with a dielectric layer exposed to a hydrogen-bearing nitrogen source.
  8. Yau, Wai-Fan; Cheung, David; Jeng, Shin-Puu; Liu, Kuowei; Yu, Yung-Cheng, Low dielectric constant film produced from silicon compounds comprising silicon-carbon bond.
  9. Chuang, Chita; Chuang, Yao-Chun; Chen, Chih-Hua; Kuo, Chen-Cheng; Chen, Chen-Shien, Metal routing architecture for integrated circuits.
  10. Kuo, Chen-Cheng; Chuang, Chita; Chen, Chih-Hua; Chen, Chen-Shien; Chuang, Yao-Chun, Metal routing architecture for integrated circuits.
  11. Lee,Jin Hyuk; Kim,Gu Sung; Lee,Dong Ho; Jang,Dong Hyeon, Method for manufacturing a wafer level chip scale package.
  12. Sabin, Gregory D.; Gross, William J.; Chang, Jung-Yueh, Method for placing active circuits beneath active bonding pads.
  13. Weimer, Ronald A., Method of fabricating an integrated circuit with a dielectric layer exposed to a hydrogen-bearing nitrogen source.
  14. Weimer, Ronald A., Method of fabricating an integrated circuit with a dielectric layer exposed to a hydrogen-bearing nitrogen source.
  15. Hopper,Peter J.; Johnson,Peter; Hwang,Kyuwoon; Mian,Michael; Drury,Robert, Method of forming a dual damascene metal trace with reduced RF impedance resulting from the skin effect.
  16. Hopper,Peter J.; Johnson,Peter; Hwang,Kyuwoon; Mian,Michael; Drury,Robert, Method of forming a metal trace with reduced RF impedance resulting from the skin effect.
  17. Hopper,Peter J.; Johnson,Peter; Hwang,Kyuwoon; Mian,Michael; Drury,Robert, Method of forming an etched metal trace with reduced RF impedance resulting from the skin effect.
  18. Sugimoto, Yasutaka, Multilayer ceramic substrate, method for producing same, and electronic component.
  19. Lin, Mou-Shiung; Chou, Chiu-Ming; Chou, Chien-Kang, Post passivation interconnection schemes on top of the IC chips.
  20. James George Michael ; Jeffrey Scott Miller ; Gary Dale Pittman ; Rosemary Ann Previti-Kelly, Post-processing a completed semiconductor device.
  21. Weimer,Ronald A., Process of forming an electrically erasable programmable read only memory with an oxide layer exposed to hydrogen and nitrogen.
  22. Anthony K. Stamper ; Sally J. Yankee, Recessed bond pad.
  23. Anthony K. Stamper ; Sally J. Yankee, Recessed bond pad.
  24. Stamper, Anthony K.; Yankee, Sally J., Recessed bond pad.
  25. Zhang, Tianhong; Ditali, Akram, Semiconductor constructions.
  26. Zhang, Tianhong; Ditali, Akram, Semiconductor constructions, semiconductor processing methods, methods of forming contact pads, and methods of forming electrical connections between metal-containing layers.
  27. Sakihama, Kazuhisa; Yamaguchi, Akira, Semiconductor device.
  28. Naoto Akiyama JP, Semiconductor device and method for manufacturing same.
  29. Nakamura,Hiroki, Semiconductor device having wiring patterns and dummy patterns covered with insulating layer.
  30. Yuzawa, Takeshi; Yuzawa, Hideki; Takano, Michiyoshi, Semiconductor device that improves electrical connection reliability.
  31. Wu, Hui-Min; Lan, Bang-Chiang; Wang, Ming-I; Su, Tzung-I; Huang, Chien-Hsin; Su, Chao-An; Tan, Tzung-Han; Chen, Min; Lin, Meng-Jia, Semiconductor structure, pad structure and protection structure.
  32. Lin, Mou-Shiung, Top layers of metal for high performance IC's.
  33. Lin, Mou-Shiung, Top layers of metal for high performance IC's.
  34. Lin, Mou-Shiung, Top layers of metal for high performance IC's.
  35. Lin, Mou-Shiung, Top layers of metal for high performance IC's.
  36. Lin, Mou-Shiung, Top layers of metal for high performance IC's.
  37. Lin, Mou-Shiung, Top layers of metal for high performance IC's.
  38. Lin, Mou-Shiung, Top layers of metal for high performance IC's.
  39. Lin, Mou-Shiung, Top layers of metal for high performance IC's.
  40. Lin,Mou Shiung, Top layers of metal for high performance IC's.
  41. Lin,Mou Shiung, Top layers of metal for high performance IC's.
  42. Lin,Mou Shiung, Top layers of metal for high performance IC's.
  43. Lin,Mou Shiung, Top layers of metal for high performance IC's.
  44. Lin,Mou Shiung, Top layers of metal for high performance IC's.
  45. Lin,Mou Shiung, Top layers of metal for high performance IC's.
  46. Lin,Mou Shiung, Top layers of metal for high performance IC's.
  47. Lin,Mou Shiung, Top layers of metal for high performance IC's.
  48. Lin,Mou Shiung, Top layers of metal for high performance IC's.
  49. Lin,Mou Shiung, Top layers of metal for high performance IC's.
  50. Lin,Mou Shiung, Top layers of metal for high performance IC's.
  51. Lin,Mou Shiung, Top layers of metal for high performance IC's.
  52. Fried, David Michael; Hergenrother, John Michael; McNab, Sharee Jane; Rooks, Michael J.; Topol, Anna, Trench structure and method for co-alignment of mixed optical and electron beam lithographic fabrication levels.
  53. Chen, Wei-Yu; Chen, Hsien-Wei; Su, An-Jhih; Hsieh, Cheng-Hsien, Under bump metallurgy (UBM) and methods of forming same.
  54. Chen, Wei-Yu; Chen, Hsien-Wei; Su, An-Jhih; Hsieh, Cheng-Hsien, Under bump metallurgy (UBM) and methods of forming same.
섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로