초록 ▼

A method and system for controlling the rate of fluid flow. A flow restrictor having known pressure drop and flow rate characteristics provided in a passage through which the fluid, preferably a gas, flows. An upstream pressure sensor determines the pressure of fluid in the flow passage upstream of

A method and system for controlling the rate of fluid flow. A flow restrictor having known pressure drop and flow rate characteristics provided in a passage through which the fluid, preferably a gas, flows. An upstream pressure sensor determines the pressure of fluid in the flow passage upstream of the flow restrictor. A downstream pressure sensor determines the pressure of fluid in the flow passage downstream of said flow restrictor. A pressure regulator adjusts the pressure of fluid upstream or downstream of the flow restrictor based on the pressure drop across the flow restrictor so that the actual pressure drop across the flow restrictor closely corresponds to the pressure drop associated with a desired rate of fluid flow.

대표청구항 ▼

[ What is claimed is:] [1.] A fluid flow controller comprising:a gas flow passage having an inlet and an outlet;a flow restrictor comprising a three-dimensional porous structure defining a through flow matrix including a plurality of pores and having known pressure drop-flow rate characteristics in

[ What is claimed is:] [1.] A fluid flow controller comprising:a gas flow passage having an inlet and an outlet;a flow restrictor comprising a three-dimensional porous structure defining a through flow matrix including a plurality of pores and having known pressure drop-flow rate characteristics in which a plurality of pressure drop values across the restrictor correspond, respectively, to known flow rate values through the restrictor;a pressure sensor determining the pressure of fluid in the flow passage upstream of or downstream from said flow restrictor;a memory containing data indicative of said known pressure drop-flow rate characteristics; anda regulator for adjusting the pressure of fluid in the flow passage wherein the pressure may be regulated to a known value and a known flow rate may be determined from the data in the memory, corresponding to the regulated pressure value.