초록 ▼

A cassette for supporting substantially planar objects such as photomasks, glass plates or semiconductor wafers during processing. The cassette is composed of bars connected at each end to an endpiece. Arms which form part of the endpiece are hinged to permit the side bars of the cassette to move in

A cassette for supporting substantially planar objects such as photomasks, glass plates or semiconductor wafers during processing. The cassette is composed of bars connected at each end to an endpiece. Arms which form part of the endpiece are hinged to permit the side bars of the cassette to move inwardly and outwardly from one another when objects are inserted in the cassette. A bridge can connect an upper portion of the arms. The bridge can be used to lift the cassette and cause flexing of the cassette to ensure better retention while the cassette is being lifted.

대표청구항 ▼

[ What is claimed is:] [1.] A method of supporting a semiconductor wafer using a wafer cassette, the method comprising:loading at least one wafer in a wafer cassette, said at least one wafer being supported by a lower support bar on which the wafer rests, and at least two side bars positioned latera

[ What is claimed is:] [1.] A method of supporting a semiconductor wafer using a wafer cassette, the method comprising:loading at least one wafer in a wafer cassette, said at least one wafer being supported by a lower support bar on which the wafer rests, and at least two side bars positioned laterally of the lower support bar, and said side bars being hingedly connected to said lower support bar;lifting the cassette and wafer from a resting surface using a bridge which connects said side bars and flexes to pull the side bars towards one another as the cassette is lifted;depositing the cassette and wafer in a wafer processing tank.