$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Quartz crystal microbalance system for detecting concentration of a selected gas component in a multicomponent gas stream

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01N-027/04
  • G01N-029/02
출원번호 US-0088315 (1998-06-01)
발명자 / 주소
  • Tom Glenn M.
출원인 / 주소
  • Advanced Technology Materials, Inc.
대리인 / 주소
    Hultquist
인용정보 피인용 횟수 : 23  인용 특허 : 31

초록

A quartz microbalance detector system for controlling the concentration of a gas component in a gas stream. The quartz microbalance interacts with the gas component, to effect a change in the oscillation frequency of the quartz microbalance detector and produce a signal correlative of concentration

대표청구항

[ What is claimed is:] [10.] A method of determining the concentration of a gas component in a gas mixture comprising same, wherein the gas component is reversibly reactive with hydroxyl functionality, and said hydroxyl functionality is regenerable in the presence of water vapor to re-establish the

이 특허에 인용된 특허 (31)

  1. DiLeo Anthony J. (Westford MA) Snow James T. (Nashua NH) Cote Daniel A. (Nashua NH), Apparatus for monitoring impurities in a gas stream.
  2. Snow James T. (Nashua NH), Apparatus for monitoring moisture in a gas stream.
  3. Tom Glenn M. (New Milford CT), Bulk gas sorption and apparatus, gas containment/treatment system comprising same, and sorbent composition therefor.
  4. Tom Glenn M. (New Milford CT) McManus James V. (Danbury CT) Luxon Bruce A. (Stamford CT), Composition, apparatus, and process, for sorption of gaseous compounds of group II-VII elements.
  5. Schonfeld Axel,DEX ; Feucht Gernot,DEX ; Frank George,DEX, Crystal oscillator sensor.
  6. Pyke Stephen C. (Sisters OR), Detection of fluids with metal-insulator-semiconductor sensors.
  7. Loesch Muriel (Paris FRX) Menil Francis (La Brede FRX) Lucat Claude (Cestas FRX) Dutronc Pascale (Paris FRX) Marteau Veronique (Survilliers FRX), Device for selective detection of gas.
  8. Hepher Michael J. (Coylton GB6) Hides Jonathan N. (Glasgow GB6), Dust monitors and dust monitoring.
  9. Neuburger Glen G. (Jackson Township ; Hudson County NJ), Early warning reactive gas detection system.
  10. Gedeon Andras (Tby SEX), Gas analyzer.
  11. Furuki Makoto (Kanagawa JPX) Pu Lyong S. (Kanagawa JPX), Gas detector.
  12. Kindlund Alf R. (Linkping SEX) Lundstrm Kurt I. (Linkping SEX), Gas detector.
  13. Minten Karl (La Hoya CA) Krug William (Hoffman Estates IL), Gas monitoring device and method.
  14. Bowers William D. (Newport Beach CA) Chuan Raymond L. (Hanalei HI), High sensitivity real-time NVR monitor.
  15. Bowers William D. (Newport Beach CA) Chuan Raymond L. (Hanalei HI), High sensitivity real-time NVR monitor.
  16. Tom Glenn M. (New Milford CT), In-line detector system for real-time determination of impurity concentration in a flowing gas stream.
  17. Tom Glenn M. (New Milford CT), In-line detector system for real-time determination of impurity concentration in a flowing gas stream.
  18. Luoma Gregory A. (Victoria CAX) Yee Lannie K. (Saanichton CAX) Turnham Barrie D. (Victoria CAX), Method and apparatus for detecting presence and concentration of vapors in gaseous fluids.
  19. Sinclair Ian (Loughborough GB2), Method and apparatus for detecting the presence of a contaminant in a gaseous carrier.
  20. White Richard Manning (Berkeley CA) Hsu Tzu-Hwa (San Jose CA), Method and apparatus for extracting derivatives from surface acoustic waves.
  21. Vig John R. (Colts Neck NJ), Method of sensing contamination in the atmosphere.
  22. Wachter Eric A. (Oak Ridge TN) Thundat Thomas G. (Knoxville TN), Microbar sensor.
  23. Bein Thomas (Albuquerque NM) Brown Kelly D. (Albuquerque NM) Frye Gregory C. (Albuquerque NM) Brinker Charles J. (Albuquerque NM), Molecular sieve sensors for selective detection at the nanogram level.
  24. Blakemore Colin B. (Wilmington DE), Piezoelectric moisture analyzers.
  25. Miller Cynthia A. ; Tom Glenn M., Piezoelectric sensor for hydride gases, and fluid monitoring apparatus comprising same.
  26. Fesler Richard (Boise ID) Nielsen Jim (Boise ID), Portable gas cylinder safety delivery system.
  27. Tom Glenn M. (New Milford CT) McManus James V. (Danbury CT), Process and composition for purifying semiconductor process gases to remove Lewis acid and oxidant impurities therefrom.
  28. Hardwick, Steven; McManus, James V., Process for sorption of hazardous waste products from exhaust gas streams.
  29. Larue Rebecca A., Sensor and method for detecting predetermined chemical species in solution.
  30. Grate Jay W., Siloxanes with strong hydrogen bond donating functionalities.
  31. Tom Glenn M. (New Milford CT) McManus James V. (Danbury CT), Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds.

이 특허를 인용한 특허 (23)

  1. Zhang, Yuegang; Berlin, Andrew A.; Ma, Qing; Wang, Li-Peng; Rao, Valluri; Yamakawa, Mineo, Biosensor utilizing a resonator having a functionalized surface.
  2. Zhang, Yuegang; Berlin, Andrew A.; Ma, Qing; Wang, Li-Peng; Rao, Valluri; Yamakawa, Mineo, Biosensor utilizing a resonator having a functionalized surface.
  3. Zhang, Yuegang; Berlin, Andrew; Ma, Qing; Wang, Li-Peng; Rao, Valluri; Yamakawa, Mineo, Biosensor utilizing a resonator having a functionalized surface.
  4. Zhang, Yuegang; Berlin, Andrew; Ma, Qing; Wang, Li-Peng; Rao, Valluri; Yamakawa, Mineo, Biosensor utilizing a resonator having a functionalized surface.
  5. Adams, Jesse D.; Sulchek, Todd A.; Feigin, Stuart C., Cantilevered probe detector with piezoelectric element.
  6. Adams, Jesse D.; Sulchek, Todd A.; Feigin, Stuart C., Cantilevered probe detector with piezoelectric element.
  7. Adams, Jesse D.; Sulchek, Todd A.; Feigin, Stuart C., Cantilevered probe detector with piezoelectric element.
  8. Adams, Jesse D.; Sulchek, Todd A.; Feigin, Stuart C., Cantilevered probe detector with piezoelectric element.
  9. Adams, Jesse D.; Rogers, Benjamin S.; Sulchek, Todd A., Cantilevered probes having piezoelectric layer, treated section, and resistive heater, and method of use for chemical detection.
  10. Adams, Jesse D.; Rogers, Benjamin S.; Sulchek, Todd A., Cantilevered probes having piezoelectric layer, treated section, and resistive heater, and method of use for chemical detection.
  11. Adams, Jesse D.; Rogers, Benjamin S., Chemical sensor with oscillating cantilevered probe and mechanical stop.
  12. Dietz, James; Bishop, Steven E.; McManus, James V.; Lurcott, Steven M.; Wodjenski, Michael J.; Kaim, Robert; DiMeo, Jr., Frank, Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel.
  13. Dietz, James; Bishop, Steven E.; McManus, James V.; Lurcott, Steven M.; Wodjenski, Michael J.; Kaim, Robert; Dimeo, Jr., Frank, Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel.
  14. Dietz, James; Bishop, Steven E.; McManus, James V.; Lurcott, Steven M.; Wodjenski, Michael J.; Kaim, Robert; Dimeo, Jr., Frank, Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel.
  15. McManus, James V.; Dietz, James; Lurcott, Steven M., Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel.
  16. Bhethanabotla, Venkat R.; Williams, Randolph D., High frequency thickness shear mode acoustic wave sensor for gas and organic vapor detection.
  17. Adams,Jesse D.; Rogers,Benjamin S.; Sulchek,Todd A., Liquid cell and passivated probe for atomic force microscopy and chemical sensing.
  18. Johal, Gaganbir Singh; Harmon, Ian Robert; Van Deusen, Richard Allen, Measurement of binding kinetics with a resonating sensor.
  19. Retz, Patrick William, Methods and apparatus for detection of air ingress into cryogen vessels.
  20. Jovancicevic, Vladimir; Ramachandran, Sunder; Hammonds, Paul, Methods and apparatus for monitoring deposit formation in gas systems.
  21. Wakamatsu, Shunichi; Koyama, Mitsuaki; Shiobara, Tsuyoshi, Quartz sensor and sensing device.
  22. Adams, Jesse D., Self-sensing array of microcantilevers for chemical detection.
  23. Pillion, John E., Vacuum sensor.
섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트