초록 ▼

The invention is relates to CVI/CVD furnace apparatus. More specifically, the invention is directed to a sealed gas inlet for a high temperature CVI/CVD furnace. A method and apparatus are provided for preventing gas leakage around a gas inlet extending through a hole in a susceptor floor in a CVI/C

The invention is relates to CVI/CVD furnace apparatus. More specifically, the invention is directed to a sealed gas inlet for a high temperature CVI/CVD furnace. A method and apparatus are provided for preventing gas leakage around a gas inlet extending through a hole in a susceptor floor in a CVI/CVD furnace. According to the invention, the gas inlet is sealed to the susceptor floor with sufficient intimacy to block leakage of gas through the hole around the gas inlet while allowing the gas inlet to cyclically translate through the hole due to thermal expansion and contraction induced by thermal cycles in the CVI/CVD furnace.

대표청구항 ▼

[ What is claimed is:] [4.] In combination, a gas inlet and a susceptor floor for use in a CVI/CVD furnace, said susceptor floor having a hole, said gas inlet comprising an impervious tube extending through said hole and having an outside surface and a bushing encircling at least one end of said imp

[ What is claimed is:] [4.] In combination, a gas inlet and a susceptor floor for use in a CVI/CVD furnace, said susceptor floor having a hole, said gas inlet comprising an impervious tube extending through said hole and having an outside surface and a bushing encircling at least one end of said impervious tube and mating with at least a portion of said outside surface and received within said hole with sufficient intimacy to block leakage of gas through said hole around said impervious tube during a CVI/CVD process.