초록 ▼

A transporting apparatus used in testing a plurality of semiconductor devices includes a magazine in which a plurality of pallets are stacked in plural stages, each pallet with a plurality of semiconductor device placed thereon; a distributing stocker mechanism for placing the plurality of pallets i

A transporting apparatus used in testing a plurality of semiconductor devices includes a magazine in which a plurality of pallets are stacked in plural stages, each pallet with a plurality of semiconductor device placed thereon; a distributing stocker mechanism for placing the plurality of pallets in the magazine onto a carrier; a carrier transporting mechanism for transporting the carrier into a test station in a constant temperature room and transporting the carrier after to outside the constant temperature room; and a recovery stocker mechanism for recovering the plurality of pallets after test on the carrier into the magazine. Thus, the transporting apparatus with high installing area efficiency and high test efficiency can be fabricated at low production cost.

대표청구항 ▼

[ What is claimed is:] [1.] A transporting apparatus used in testing a plurality of semiconductor devices, comprising:a magazine having a plurality of pallets stacked in plural stages, each pallet having plural semiconductor devices placed thereon, said plurality of pallets stacked in said magazine

[ What is claimed is:] [1.] A transporting apparatus used in testing a plurality of semiconductor devices, comprising:a magazine having a plurality of pallets stacked in plural stages, each pallet having plural semiconductor devices placed thereon, said plurality of pallets stacked in said magazine forming a single stacked unit;a distributing stocker mechanism configured to place said single stacked unit of said plurality of pallets stacked in said magazine into a distributing stocker via a single placing action and to distribute a portion of the plurality of pallets from the single stacked unit of the distributing stocker onto a carrier;a test station provided within a constant temperature room for testing said plurality of semiconductor devices on the portion of the plurality of pallets carried by the carrier;a carrier transporting mechanism including an IN side carrier transporting mechanism for transporting the carrier with said pallets thereon to said test station and an OUT side carrier transporting mechanism for transporting said carrier after testing to outside said constant temperature room; anda recovery stocker mechanism configured to place the portion of the plurality of pallets carried by said carrier into a recovery stocker after testing, form another single staked unit of said plurality of pallets, and to place, at one time, all said plurality of pallets of said other single staked unit from said recovery stocker into said magazine, whereinsaid distributing stocker mechanismincludes a pallet pushing up unit which moves from an opening of a lower face of said magazine to below said distributing stocker mechanism thereby to lift said plurality of pallets into said disbributing stocker, andserves to hold said plurality of pallets lifted, and to descend, separate and distribute said plurality of pallets one by one from the lowest pallet.