초록 ▼

An interface seal between a gas flow line within a support surface for a pod and a flow valve mounted within the pod. The kinematic coupling between a pod and support surface aligns a pair of inlet and outlet valves on a bottom surface of the pod with a corresponding pair of inlet and outlet holes i

An interface seal between a gas flow line within a support surface for a pod and a flow valve mounted within the pod. The kinematic coupling between a pod and support surface aligns a pair of inlet and outlet valves on a bottom surface of the pod with a corresponding pair of inlet and outlet holes in the support surface, through which gas may be injected into and removed from the pod, respectively. The interface according to the various embodiments of the invention provides a durable seal substantially preventing leakage between the pod and support surface while at the same time being compatible with kinematic couplings. In embodiments of the invention, the seal is thin and flexible, and expands into engagement with the pod to establish the seal. This type of interface seal will not interfere with the proper seating of the pod on the kinematic pins. Moreover, in a relaxed state, embodiments of the interface seal extend only a small distance above the support surface, and have no edges that are capable of catching on the pod as the pod is loaded or removed at low angles.

대표청구항 ▼

[ We claim:] [1.] An interface seal for allowing gas flow between a stationary support surface and a movable pod brought to and supported on the support surface, the interface seal comprising:a flexible seal within the support surface capable of substantially preventing leakage of gas between the su

[ We claim:] [1.] An interface seal for allowing gas flow between a stationary support surface and a movable pod brought to and supported on the support surface, the interface seal comprising:a flexible seal within the support surface capable of substantially preventing leakage of gas between the support surface and pod around said flexible seal upon seating of the pod on the support surface and expansion of said flexible seal, wherein said gas flow expands said flexible seal,wherein said flexible seal allows the pod to approach the support surface from an angle between approximately 0.degree. and 90.degree. immediately prior to contact of the pod with the support surface.