초록 ▼

A chemical-mechanical-polishing system having a slurry distribution system, a polisher, a deionized water supply, and a drain, includes a slurry filtration system. The filtration system has two filters for alternately filtering particles in slurry and being backflushed with deionized water. Two inpu

A chemical-mechanical-polishing system having a slurry distribution system, a polisher, a deionized water supply, and a drain, includes a slurry filtration system. The filtration system has two filters for alternately filtering particles in slurry and being backflushed with deionized water. Two input valves have input ports connected to the slurry distribution system and output ports respectively connected to the filters for filtering. Two output valves have input ports respectively connected to the filters for receiving filtered slurry and output ports connected to the polisher. Two backflush valves have input ports connected to the deionized water supply and output ports respectively connected to backflush with deionized water; the output ports are also respectively connected to the input ports of the two output valves. Two drain valves have input ports respectively connected to the filters for receiving backflushed fluid and output ports connected to the drain. A pressure sensor disposed to sense pressure of slurry across the filters provide pressure indications which are used by control circuitry to open and close said valves to filter slurry or backflush the filters.

대표청구항 ▼

[ The invention claimed is:] [1.] Apparatus comprising:a source of particulate containing fluid;a user of particulate containing fluid;a source of backflushing fluid;a drain for said fluids;a first filter;a second filter;valving means for respectively connecting in first and second modes:said source

[ The invention claimed is:] [1.] Apparatus comprising:a source of particulate containing fluid;a user of particulate containing fluid;a source of backflushing fluid;a drain for said fluids;a first filter;a second filter;valving means for respectively connecting in first and second modes:said source of particulate containing fluid through said first filter to said user of said particulate containing fluid and said source of backflushing fluid through said second filter to said drain for said fluids; andsaid source of particulate containing fluid through said second filter to said user of said particulate containing fluid and said source of backflushing fluid through said first filter to said drain for said fluids;said valving means includes precharging valving means for connecting said source of particulate containing fluid to said first filter during said second mode and said second filter during said first mode; anda control system for changing said valving means between said first and second modes.