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Methods and systems for distributing liquid chemicals 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01F-011/00
출원번호 US-0158740 (1998-09-22)
발명자 / 주소
  • Xu Mindi
  • Vigor Xavier
출원인 / 주소
  • American Air Liquide, Inc.
대리인 / 주소
    Wendt
인용정보 피인용 횟수 : 34  인용 특허 : 14

초록

Briefly, this invention uses one or more pressure vessels having installed therein on its inside a balloon of flexible and non-expandable wall to smoothly and continuously deliver a chemical to any end user without contamination and gas dissolution. Since the balloon installed inside the pressure ve

대표청구항

[ What is claimed is:] [1.] A system for transferring and delivering a liquid chemical from a bulk source to an end use station, the system comprising:(a) a pressure vessel connected to the bulk source by a delivery conduit, the pressure vessel having an internal surface, the delivery conduit having

이 특허에 인용된 특허 (14)

  1. Geatz Tobin (Durham NC), Apparatus and method for the transfer and delivery of high purity chemicals.
  2. Magnasco Enrico (Rapallo ITX) Viale Giorgio (Chiavari ITX 4), Apparatus for the selection, metering and delivery of liquids, in particular treatment liquids for industrial laundry wa.
  3. Strength Vernon Edward ; Sherry George John ; Adkisson Robert Wesley, Automated dispenser.
  4. Ramsay Bruce P. (Milton VT), Chemical delivery system.
  5. Chapman John A. (Wahoo NE), Chemical distribution system.
  6. Morgan Vernon E. ; Reedy Carl D., Continuous recirculation fluid delivery system and method.
  7. Grant Donald C. (Excelsior MN), Dynamic contaminant extraction measurement for chemical distribution systems.
  8. Saito Satoshi (Kyoto JPX) Fujita Yuko (Kyoto JPX), Electrochemical fluid delivery device.
  9. Topping Joseph C. (Austin TX) Neeb William M. (Rochester Hills MI), Liquid transfer apparatus.
  10. Strother Arden R., Method and apparatus for extracting excess material from containers.
  11. Ferri ; Jr. Edward T. (Gilroy CA) Geatz J. Tobin (Durham NC), Process and apparatus for electronic control of the transfer and delivery of high purity chemicals.
  12. Ferri ; Jr. Edward T. (Gilroy CA) Geatz J. Tobin (Durham NC), Process and apparatus for electronic control of the transfer and delivery of high purity chemicals.
  13. Bernosky Eugene W. (San Jose CA) Geatz J. Tobin (Durham NC) Ferri ; Jr. Edward T. (Gilroy CA) Roberson ; Jr. Glenn A. (Hollister CA), Process and apparatus for precise volumetric diluting/mixing of chemicals.
  14. Oyler Edward N. (Newnan GA) Stover Harold F. (Grantville GA), Self-contained beverage dispensing system.

이 특허를 인용한 특허 (34)

  1. Soon Chye Chan MY; Bak Hong Chia SG; Chun Pheng Tan SG, Apparatus and method for detecting bad edge bead removal in a spin-on-glass coater tool.
  2. Nicholes, Mary Kristin; Carlson, Stephen John; Litchy, Mark R., Apparatus and method for sampling a chemical-mechanical polishing slurry.
  3. Kelekar, Rajesh, Calibration of a chemical dispense system.
  4. Tracy, Mark S.; Yin, Memphis-Zhihong, Computer thermal dissipation system and method.
  5. Miller, Harry James, Discharge system and methods of discharging a chemical.
  6. Evanovich, Steven R.; Kiderman, Alexander D., Dynamic particle removing flushing system.
  7. Lim, Gregory; Francis, Aaron; Williams, Kenneth; Mariserla, Sandeep, Ex-situ cleaning assembly.
  8. Lurcott, Steven M.; Hughes, John E. Q.; Wrschka, Peter; Baum, Thomas H.; Ware, Donald D.; Zou, Peng, Fluid processing systems and methods.
  9. Lurcott, Steven M.; Hughes, John E. Q.; Wrschka, Peter; Baum, Thomas H.; Ware, Donald D.; Zou, Peng, Fluid processing systems and methods.
  10. O'Dougherty, Kevin T.; Tom, Glenn M., Fluid storage and dispensing systems and processes.
  11. O'Dougherty, Kevin T.; Tom, Glenn M., Fluid storage and dispensing systems and processes.
  12. Hsu, Ching-Jung; Hung, Yung-Ti; Hsu, Chun-Feng; Cheng, Nan-Peng, Fluid supply system, wafer processing system, and method of supplying fluid to wafer processing equipment.
  13. Sund, Wesley E.; Dille, Joseph C.; Barger, Michael J.; Pawlas, Gary E., High purity fluid delivery system.
  14. Zollinger, David L.; Hasson, Kenton C., Hyperpolarized noble gas extraction methods, masking methods, and associated transport containers.
  15. Lim, Gregory; Francis, Aaron; Williams, Kenneth, In-situ cleaning assembly.
  16. Xu,Mindi; Sayasane,Tay; Paganessi,Joseph E.; Jursich,Gregory M.; Nakamoto,Naoyuki; Nishikawa,Yukinobu; Dulphy,Herve E.; Rameau,Guillaume; Honda,Lorrin, Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical.
  17. Hovinen, Minna; Kingery, John R.; Tom, Glenn M.; O'Dougherty, Kevin T.; Mikkelsen, Kirk; Ware, Donald D.; Van Buskirk, Peter C., Liner-based liquid storage and dispensing systems with empty detection capability.
  18. Hovinen, Minna; Kingery, John R.; Tom, Glenn M.; O'Dougherty, Kevin T.; Mikkelsen, Kirk; Ware, Donald D.; Van Buskirk, Peter C., Liner-based liquid storage and dispensing systems with empty detection capability.
  19. Hovinen, Minna; Kingery, John R.; Tom, Glenn M.; O'Dougherty, Kevin T.; Mikkelsen, Kirk; Ware, Donald D.; Van Buskirk, Peter C., Liner-based liquid storage and dispensing systems with empty detection capability.
  20. Ware, Donald D.; Tom, Glenn M.; Dathe, Paul; Koland, Amy; Gerold, Jason; Mikkelsen, Kirk; O'Dougherty, Kevin T.; Cisewski, Michael A., Liquid dispensing systems encompassing gas removal.
  21. Ware, Donald D.; Tom, Glenn M.; Dathe, Paul; Koland, Amy; Gerold, Jason; Mikkelsen, Kirk; O'Dougherty, Kevin T.; Cisewski, Michael A., Liquid dispensing systems encompassing gas removal.
  22. Matsumoto, Kazuhisa, Liquid processing apparatus, liquid processing method, and recording medium having program stored therein.
  23. Hiranaga, Hajime; Tsuzuki, Shuichi; Hoshino, Tatsuya, Liquids dispensing systems and methods.
  24. Tom, Glenn; Nelson, Greg; Liu, Wei; Koland, Amy; Ware, Don; Durham, Daniel J.; Momany, Tracy M.; Roush, Chantel, Nested blow molded liner and overpack and methods of making same.
  25. Pozniak, Peter Martin; Provost, Charles Andre; Singh, Rakesh Kumar; Vo, Sau Van; Roberts, Benjamin Rush, Precision liquid mixing apparatus and method.
  26. Pozniak, Peter Martin; Provost, Charles Andre; Singh, Rakesh Kumar; Vo, Sau Van; Roberts, Benjamin Rush, Precision liquid mixing apparatus and method.
  27. Kelekar, Rajesh, Preparing a chemical delivery line of a chemical dispense system for delivery.
  28. Seher, Jens-Peter; Pross, Gerhard, Pressure-variation fluid transport, in particular for body-fluid analysis.
  29. Gauthier, Jerome M., Single soap pump for use with water displacement soap containers and peristaltic pump.
  30. Byers, Gary Allen; Derecskei, Bela; Bayer, Benjamin Patrick, Slurry supply and/or chemical blend supply apparatuses, processes, methods of use and methods of manufacture.
  31. Tom, Glenn; Baum, Thomas H.; Kusz, Matthew; Menning, Joseph; Nelson, Greg; Lee, Dongyun; Liu, Wei; Kim, Kanghyun; Boggs, Karl; Chism, Richard, Substantially rigid collapsible liner and flexible gusseted or non-gusseted liners and methods of manufacturing the same and methods for limiting choke-off in liners.
  32. Doughty, Kurt J., Temperature compensation system and method.
  33. Goepfert,Gerard F., Under counter dispenser.
  34. Goepfert,Gerard F., Under counter dispenser.
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