초록 ▼

A polishing pad is formed as a one-piece article having a region which is transparent and an adjacent region which is opaque. The article is formed by solidifying a flowable polymeric material which at least initially has a uniform composition. The flowable polymeric material is processed during a m

A polishing pad is formed as a one-piece article having a region which is transparent and an adjacent region which is opaque. The article is formed by solidifying a flowable polymeric material which at least initially has a uniform composition. The flowable polymeric material is processed during a molding operation to provide the transparent region and the adjacent opaque region. Types of polymeric material suitable for making the polishing pad include a single thermoplastic material, a blend of thermoplastic materials, and a reactive thermosetting polymer.

대표청구항 ▼

[ We claim:] [1.] A polishing pad comprising:said polishing pad having at least one, optically transmissive region each having the same chemical formulation as a remainder of said polishing pad;said material formulation being of optically transmissive phase in each optically transmissive region;said

[ We claim:] [1.] A polishing pad comprising:said polishing pad having at least one, optically transmissive region each having the same chemical formulation as a remainder of said polishing pad;said material formulation being of optically transmissive phase in each optically transmissive region;said material formulation being of opaque region in the remainder of said polishing pad; andsaid material formulation providing a transition from said optically transmissive phase to said opaque region without a structurally distinct boundary between each optically transmissive region and the remainder of said polishing pad.